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    Growth of SiC films on silicon substrate by cold implantation of carbon recoil atoms

    New search for: Zinenko, V.I.
    New search for: Agafonov, Yu.A.
    New search for: Saraykin, V.V.
    New search for: Eremenko, V.G.
    New search for: Roshchupkin, D.V.
    New search for: Sedlovets, D.M.

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    Growth of SiC films on silicon substrate by cold implantation of carbon recoil atoms

    New search for: Zinenko, V.I.
    New search for: Agafonov, Yu.A.
    New search for: Saraykin, V.V.
    New search for: Eremenko, V.G.
    New search for: Roshchupkin, D.V.
    New search for: Sedlovets, D.M.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Growth of SiC films on silicon substrate by cold implantation of carbon recoil atoms

    New search for: Zinenko, V.I.
    New search for: Agafonov, Yu.A.
    New search for: Saraykin, V.V.
    New search for: Eremenko, V.G.
    New search for: Roshchupkin, D.V.
    New search for: Sedlovets, D.M.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

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    Document information
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    Document information
    Title:

    Growth of SiC films on silicon substrate by cold implantation of carbon recoil atoms

    Contributors:

    Zinenko, V.I. (author) / Agafonov, Yu.A. (author) / Saraykin, V.V. (author) / Eremenko, V.G. (author) / Roshchupkin, D.V. (author) / Sedlovets, D.M. (author)

    Published in:

    MATERIALS LETTERS ; 233 ; 115-117

    Publication date:

    2018-01-01

    Size:

    3 pages

    ISSN:

    0167-577X

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    Unknown

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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