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    Dopant, composition and carrier profiling for 3D structures

    New search for: Vandervorst, W.
    New search for: Fleischmann, C.
    New search for: Bogdanowicz, J.
    New search for: Franquet, A.
    New search for: Celano, U.
    New search for: Paredis, K.
    New search for: Budrevich, A.

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    Dopant, composition and carrier profiling for 3D structures

    New search for: Vandervorst, W.
    New search for: Fleischmann, C.
    New search for: Bogdanowicz, J.
    New search for: Franquet, A.
    New search for: Celano, U.
    New search for: Paredis, K.
    New search for: Budrevich, A.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Dopant, composition and carrier profiling for 3D structures

    New search for: Vandervorst, W.
    New search for: Fleischmann, C.
    New search for: Bogdanowicz, J.
    New search for: Franquet, A.
    New search for: Celano, U.
    New search for: Paredis, K.
    New search for: Budrevich, A.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

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    Document information
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    Document information
    Title:

    Dopant, composition and carrier profiling for 3D structures

    Contributors:

    Vandervorst, W. (author) / Fleischmann, C. (author) / Bogdanowicz, J. (author) / Franquet, A. (author) / Celano, U. (author) / Paredis, K. (author) / Budrevich, A. (author)

    Published in:

    Materials science in semiconductor processing ; 62 ; 31-48

    Publication date:

    2017-01-01

    Size:

    18 pages

    ISSN:

    1369-8001

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  621.38152

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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