Accurate CsM^+ SIMS Aluminum Dopant Profiling in SiC: Fid-Bau Portal

Accurate CsM^+ SIMS Aluminum Dopant Profiling in SiC

Smith, H. E. / Tsao, B. H. / Scofield, J. D.

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Accurate CsM^+ SIMS Aluminum Dopant Profiling in SiC

Smith, H. E. / Tsao, B. H. / Scofield, J. D.

Accurate CsM^+ SIMS Aluminum Dopant Profiling in SiC

Smith, H. E. / Tsao, B. H. / Scofield, J. D.

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Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Accurate CsM^+ SIMS Aluminum Dopant Profiling in SiC

Contributors:

Smith, H. E. (author) / Tsao, B. H. (author) / Scofield, J. D. (author) / Devaty, R. P. / Larkin, D. J. / Saddow, S. E.

Published in:

Silicon Carbide and Related Materials - 2005 ; 629-632

MATERIALS SCIENCE FORUM ; 527/529

Publication date:

2006-01-01

Size:

4 pages

ISSN:

0255-5476

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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