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Improved electrical properties of pulsed DC magnetron sputtered hydrogen doped indium oxide after annealing in air
Improved electrical properties of pulsed DC magnetron sputtered hydrogen doped indium oxide after annealing in air
Improved electrical properties of pulsed DC magnetron sputtered hydrogen doped indium oxide after annealing in air
Erfurt, Darja (author) / Heinemann, Marc D. (author) / Körner, Stefan (author) / Szyszka, Bernd (author) / Klenk, Reiner (author) / Schlatmann, Rutger (author)
Materials science in semiconductor processing ; 89 ; 170-175
2019-01-01
6 pages
Article (Journal)
English
DDC:
621.38152
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