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Atomistic mechanisms of Cu CMP in aqueous H2O2: Molecular dynamics simulations using ReaxFF reactive force field
Atomistic mechanisms of Cu CMP in aqueous H2O2: Molecular dynamics simulations using ReaxFF reactive force field
Atomistic mechanisms of Cu CMP in aqueous H2O2: Molecular dynamics simulations using ReaxFF reactive force field
Guo, Xiaoguang (author) / Wang, Xiaoli (author) / Jin, Zhuji (author) / Kang, Renke (author)
Computational materials science ; 155 ; 476-482
2018-01-01
7 pages
Article (Journal)
Unknown
DDC:
620.1
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