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Investigation of morphological and optical properties of nanostructured layers formed by the SSCT etching of silicon
Investigation of morphological and optical properties of nanostructured layers formed by the SSCT etching of silicon
Investigation of morphological and optical properties of nanostructured layers formed by the SSCT etching of silicon
Jurečka, Stanislav (author) / Imamura, Kentaro (author) / Matsumoto, Taketoshi (author) / Kobayashi, Hikaru (author)
Applied surface science ; 461 ; 72-77
2018-01-01
6 pages
Article (Journal)
English
DDC:
620.44
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