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A kinetic study of ZnO atomic layer deposition: Effects of surface hydroxyl concentration and steric hindrance
A kinetic study of ZnO atomic layer deposition: Effects of surface hydroxyl concentration and steric hindrance
A kinetic study of ZnO atomic layer deposition: Effects of surface hydroxyl concentration and steric hindrance
Kim, Sungjoon (author) / Lee, Sunyoung (author) / Ham, So-Yeon (author) / Ko, Dong-Hyun (author) / Shin, Seokhee (author) / Jin, Zhenyu (author) / Min, Yo-Sep (author)
Applied surface science ; 469 ; 804-810
2019-01-01
7 pages
Article (Journal)
English
DDC:
620.44
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