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    The effect of energy and momentum transfer during magnetron sputter deposition of yttrium oxide thin films

    New search for: Xia, Jinjiao
    New search for: Liang, Wenping
    New search for: Miao, Qiang
    New search for: Depla, Diederik

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    The effect of energy and momentum transfer during magnetron sputter deposition of yttrium oxide thin films

    New search for: Xia, Jinjiao
    New search for: Liang, Wenping
    New search for: Miao, Qiang
    New search for: Depla, Diederik

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    The effect of energy and momentum transfer during magnetron sputter deposition of yttrium oxide thin films

    New search for: Xia, Jinjiao
    New search for: Liang, Wenping
    New search for: Miao, Qiang
    New search for: Depla, Diederik

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    The effect of energy and momentum transfer during magnetron sputter deposition of yttrium oxide thin films

    Contributors:

    Xia, Jinjiao (author) / Liang, Wenping (author) / Miao, Qiang (author) / Depla, Diederik (author)

    Published in:

    Applied surface science ; 439 ; 545-551

    Publication date:

    2018-01-01

    Size:

    7 pages

    ISSN:

    0169-4332

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.44

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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