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A platform for research: civil engineering, architecture and urbanism
In situ measurement of the surface stress evolution during magnetron sputter-deposition of Ag thin film
In situ measurement of the surface stress evolution during magnetron sputter-deposition of Ag thin film
In situ measurement of the surface stress evolution during magnetron sputter-deposition of Ag thin film
Lee, S. H. (author) / Park, J. K. (author)
APPLIED SURFACE SCIENCE ; 253 ; 9112-9115
2007-01-01
4 pages
Article (Journal)
English
DDC:
621.35
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