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6H-SiC blistering efficiency as a function of the hydrogen implantation fluence

Daghbouj, N. / Li, B.S. / Karlik, M. / Declemy, A.

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6H-SiC blistering efficiency as a function of the hydrogen implantation fluence

Daghbouj, N. / Li, B.S. / Karlik, M. / Declemy, A.

6H-SiC blistering efficiency as a function of the hydrogen implantation fluence

Daghbouj, N. / Li, B.S. / Karlik, M. / Declemy, A.

Access

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Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

6H-SiC blistering efficiency as a function of the hydrogen implantation fluence

Contributors:

Daghbouj, N. (author) / Li, B.S. (author) / Karlik, M. (author) / Declemy, A. (author)

Published in:

Applied surface science ; 466 ; 141-150

Publication date:

2019-01-01

Size:

10 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.44

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