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Morphological and electrical properties of Nickel based Ohmic contacts formed by laser annealing process on n-type 4H-SiC
Morphological and electrical properties of Nickel based Ohmic contacts formed by laser annealing process on n-type 4H-SiC
Morphological and electrical properties of Nickel based Ohmic contacts formed by laser annealing process on n-type 4H-SiC
Rascunà, S. (author) / Badalà, P. (author) / Tringali, C. (author) / Bongiorno, C. (author) / Smecca, E. (author) / Alberti, A. (author) / Di Franco, S. (author) / Giannazzo, F. (author) / Greco, G. (author) / Roccaforte, F. (author)
Materials science in semiconductor processing ; 97 ; 62-66
2019-01-01
5 pages
Article (Journal)
English
DDC:
621.38152
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