Morphological and electrical properties of Nickel based Ohmic contacts formed by laser annealing process on n-type 4H-SiC: Fid-Bau Portal

Morphological and electrical properties of Nickel based Ohmic contacts formed by laser annealing process on n-type 4H-SiC

Rascunà, S. / Badalà, P. / Tringali, C. / Bongiorno, C. / Smecca, E. / Alberti, A. / Di Franco, S. / Giannazzo, F. / Greco, G. / Roccaforte, F. / ... [mehr]

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Morphological and electrical properties of Nickel based Ohmic contacts formed by laser annealing process on n-type 4H-SiC

Rascunà, S. / Badalà, P. / Tringali, C. / Bongiorno, C. / Smecca, E. / Alberti, A. / Di Franco, S. / Giannazzo, F. / Greco, G. / Roccaforte, F. / ... [mehr]

Morphological and electrical properties of Nickel based Ohmic contacts formed by laser annealing process on n-type 4H-SiC

Rascunà, S. / Badalà, P. / Tringali, C. / Bongiorno, C. / Smecca, E. / Alberti, A. / Di Franco, S. / Giannazzo, F. / Greco, G. / Roccaforte, F. / ... [mehr]

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Titel:

Morphological and electrical properties of Nickel based Ohmic contacts formed by laser annealing process on n-type 4H-SiC

Beteiligte:

Rascunà, S. (Autor:in) / Badalà, P. (Autor:in) / Tringali, C. (Autor:in) / Bongiorno, C. (Autor:in) / Smecca, E. (Autor:in) / Alberti, A. (Autor:in) / Di Franco, S. (Autor:in) / Giannazzo, F. (Autor:in) / Greco, G. (Autor:in) / Roccaforte, F. (Autor:in)

Erschienen in:

Materials science in semiconductor processing ; 97 ; 62-66

Erscheinungsdatum:

01.01.2019

Format / Umfang:

5 pages

ISSN:

1369-8001

Medientyp:

Aufsatz (Zeitschrift)

Format:

Sprache:

Englisch

Klassifikation:

DDC: 621.38152

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