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A platform for research: civil engineering, architecture and urbanism
Elimination of boundary effect in silicon electrochemical etching via mechanical stress
Elimination of boundary effect in silicon electrochemical etching via mechanical stress
Elimination of boundary effect in silicon electrochemical etching via mechanical stress
Ge, Daohan (author) / Lu, Le (author) / Huang, Xiukang (author) / Zhang, Jinhua (author) / Qian, Dongliang (author) / Zhang, Liqiang (author) / Li, Zhibao (author)
International journal of materials and structural integrity ; 10 ; 170-180
2016-01-01
11 pages
Article (Journal)
English
DDC:
620.112
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