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Silicon etching techniques and application to mechanical devices

Bourouina, T. / Spirkovitch, S. / Marty, F. / Baillieu, F.

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Silicon etching techniques and application to mechanical devices

Bourouina, T. / Spirkovitch, S. / Marty, F. / Baillieu, F.

Silicon etching techniques and application to mechanical devices

Bourouina, T. / Spirkovitch, S. / Marty, F. / Baillieu, F.

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Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Silicon etching techniques and application to mechanical devices

Contributors:

Bourouina, T. (author) / Spirkovitch, S. (author) / Marty, F. (author) / Baillieu, F. (author)

Published in:

APPLIED SURFACE SCIENCE ; 65//66 ; 536

Publication date:

1993-01-01

Size:

536 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

Unknown

Classification:

DDC: 621.35

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