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    Effect of counter-surface chemistry on defect-free material removal of monocrystalline silicon

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    New search for: Chen, Cheng
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    New search for: Qian, Linmao

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    Effect of counter-surface chemistry on defect-free material removal of monocrystalline silicon

    New search for: Xiao, Chen
    New search for: Chen, Cheng
    New search for: Wang, Hongbo
    New search for: Chen, Lei
    New search for: Jiang, Liang
    New search for: Yu, Bingjun
    New search for: Qian, Linmao

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Effect of counter-surface chemistry on defect-free material removal of monocrystalline silicon

    New search for: Xiao, Chen
    New search for: Chen, Cheng
    New search for: Wang, Hongbo
    New search for: Chen, Lei
    New search for: Jiang, Liang
    New search for: Yu, Bingjun
    New search for: Qian, Linmao

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Effect of counter-surface chemistry on defect-free material removal of monocrystalline silicon

    Contributors:

    Xiao, Chen (author) / Chen, Cheng (author) / Wang, Hongbo (author) / Chen, Lei (author) / Jiang, Liang (author) / Yu, Bingjun (author) / Qian, Linmao (author)

    Published in:

    Wear = ; 426 ; 1233-1239

    Publication date:

    2019-01-01

    Size:

    7 pages

    ISSN:

    0043-1648

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  621.89

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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