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Microanalysis of titanium nitride diffusion barriers

Bonelli, M.

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Microanalysis of titanium nitride diffusion barriers

Bonelli, M.

Microanalysis of titanium nitride diffusion barriers

Bonelli, M.

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Document information

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Document information

Title:

Microanalysis of titanium nitride diffusion barriers

Contributors:

Bonelli, M.

Published in:

IRST technical report ; 9305-16

Publication date:

1993

Size:

16 S

Remarks:

graph. Darst
Digital preservation by Technische Informationsbibliothek (TIB) / Leibniz-Informationszentrum Technik und Naturwissenschaften und Universitätsbibliothek

Type of media:

Book

Type of material:

Language:

English

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