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    An investigation of improved titanium/titanium nitride barriers for submicron aluminum-filled contacts by energy-filtered transmission electron microscopy

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    New search for: Robl, W.

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    An investigation of improved titanium/titanium nitride barriers for submicron aluminum-filled contacts by energy-filtered transmission electron microscopy

    New search for: Rucki, A.
    New search for: Robl, W.

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    An investigation of improved titanium/titanium nitride barriers for submicron aluminum-filled contacts by energy-filtered transmission electron microscopy

    New search for: Rucki, A.
    New search for: Robl, W.

    Access

    Access via TIB
    Check availability in my library
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    Document information
    Title:

    An investigation of improved titanium/titanium nitride barriers for submicron aluminum-filled contacts by energy-filtered transmission electron microscopy

    Contributors:

    Rucki, A. (author) / Robl, W. (author)

    Published in:

    INTERNATIONAL JOURNAL OF MATERIALS RESEARCH ; 97 ; 1037-1040

    Publication date:

    2006-01-01

    Size:

    4 pages

    ISSN:

    1862-5282

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  669.9

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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