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Modeling and robust adaptive tracking control of a planar precision positioning system
Precision positioning systems constitute an essential prerequisite for modern production processes in the diverse applications of micro- and nanotechnology. Associated with the control of these systems there are high demands with respect to bandwidth, accuracy, robustness and stability. The most important requirement, however, is dynamic tracking of complex reference trajectories with highest precision. To achieve these objectives, usually a good knowledge of system parameters is necessary, whereby their identification is mostly laborious and expensive. In addition, depending on the production process or plant, parameters may change with time which may endanger the achievement of these goals. From an economic perspective, it is therefore desirable that parameter identification is carried out during operation, within the control scheme. This reduces the effort for system identification and also ensures that the controller may also adapt to parametric changes. Based on this motivation, the present thesis deals with the development of an adaptive tracking control concept for the planar precision positioning system PPS1405 build by the motor manufacturer Tetra. The development and identification of detailed system models of the most important components of the PPS1405 is the foundation for this. The developed model serves firstly as a basis for model-based control design and secondly as a realistic simulation environment for testing and evaluation of the controllers designed. Furthermore, the model gives insights about the potential applicability of adaptive control which is confirmed throughout the analysis. Following this, the aspired tracking control design is based on the idea of a two-stage approach, comprising a nominal tracking controller and an adaptive augmentation exploiting ideas from $\mathcal{L}_1$ adaptive control. The latter seems promising in view of remarkable performance and robustness properties. For the adaptive tracking controller, both, state and output feedback schemes are developed, whereas ...
Modeling and robust adaptive tracking control of a planar precision positioning system
Precision positioning systems constitute an essential prerequisite for modern production processes in the diverse applications of micro- and nanotechnology. Associated with the control of these systems there are high demands with respect to bandwidth, accuracy, robustness and stability. The most important requirement, however, is dynamic tracking of complex reference trajectories with highest precision. To achieve these objectives, usually a good knowledge of system parameters is necessary, whereby their identification is mostly laborious and expensive. In addition, depending on the production process or plant, parameters may change with time which may endanger the achievement of these goals. From an economic perspective, it is therefore desirable that parameter identification is carried out during operation, within the control scheme. This reduces the effort for system identification and also ensures that the controller may also adapt to parametric changes. Based on this motivation, the present thesis deals with the development of an adaptive tracking control concept for the planar precision positioning system PPS1405 build by the motor manufacturer Tetra. The development and identification of detailed system models of the most important components of the PPS1405 is the foundation for this. The developed model serves firstly as a basis for model-based control design and secondly as a realistic simulation environment for testing and evaluation of the controllers designed. Furthermore, the model gives insights about the potential applicability of adaptive control which is confirmed throughout the analysis. Following this, the aspired tracking control design is based on the idea of a two-stage approach, comprising a nominal tracking controller and an adaptive augmentation exploiting ideas from $\mathcal{L}_1$ adaptive control. The latter seems promising in view of remarkable performance and robustness properties. For the adaptive tracking controller, both, state and output feedback schemes are developed, whereas ...
Modeling and robust adaptive tracking control of a planar precision positioning system
Treichel, Kai (author) / Reger, Johann / Holzapfel, Florian / Hovakimyan, Naira
2018-06-27
Theses
Electronic Resource
English
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