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Mechanical behavior of laser micro-machined bulk 6H–SiC diaphragms
AbstractMechanical behavior of laser micro-machined monolithic hexagonal silicon carbide (6H–SiC) diaphragms was investigated to determine the effects of laser processing. Square diaphragms with a nominal size of 1.5mm×1.5mm were fabricated from bulk 6H–SiC wafers using a Q-switched Nd:YAG laser operating at a wavelength of 1064nm, an average power of 0.35W, a pulse repetition rate of 3kHz, and a pulse width of 100ns. These parameters were chosen, based on previous experiments, to minimize surface roughness. Analysis of laser-machined diaphragms revealed that the average thickness of a diaphragm was 151μm which is composed of two layers. One is a soft, black layer with a thickness of about 83μm consisting of silicon, oxygen, and carbon. The other layer was a hard, virgin SiC layer with a thickness of 68μm. The diaphragms were subjected to micro-hardness indentation tests to obtain load versus deflection curves. The data was validated using Timoshenko’s analytical model for maximum deflection of a thin plate under concentrated loading with hinged and clamped boundary conditions. Experimental measurements of the deflection were found to be slightly higher than those predicted by the analytical model. The variations in the thickness of the diaphragms, homogeneity of the elastic properties of the laser micro-machined SiC, and possibly inappropriate boundary conditions during testing of the diaphragms chiefly account for the deviations between the experimental results and the analytical model.
Mechanical behavior of laser micro-machined bulk 6H–SiC diaphragms
AbstractMechanical behavior of laser micro-machined monolithic hexagonal silicon carbide (6H–SiC) diaphragms was investigated to determine the effects of laser processing. Square diaphragms with a nominal size of 1.5mm×1.5mm were fabricated from bulk 6H–SiC wafers using a Q-switched Nd:YAG laser operating at a wavelength of 1064nm, an average power of 0.35W, a pulse repetition rate of 3kHz, and a pulse width of 100ns. These parameters were chosen, based on previous experiments, to minimize surface roughness. Analysis of laser-machined diaphragms revealed that the average thickness of a diaphragm was 151μm which is composed of two layers. One is a soft, black layer with a thickness of about 83μm consisting of silicon, oxygen, and carbon. The other layer was a hard, virgin SiC layer with a thickness of 68μm. The diaphragms were subjected to micro-hardness indentation tests to obtain load versus deflection curves. The data was validated using Timoshenko’s analytical model for maximum deflection of a thin plate under concentrated loading with hinged and clamped boundary conditions. Experimental measurements of the deflection were found to be slightly higher than those predicted by the analytical model. The variations in the thickness of the diaphragms, homogeneity of the elastic properties of the laser micro-machined SiC, and possibly inappropriate boundary conditions during testing of the diaphragms chiefly account for the deviations between the experimental results and the analytical model.
Mechanical behavior of laser micro-machined bulk 6H–SiC diaphragms
Simsek, Emrah (author) / Buehler, Michelle (author) / Pecholt, Ben (author) / Molian, Pal (author)
2010-02-17
5 pages
Article (Journal)
Electronic Resource
English
Mechanical behavior of laser micro-machined bulk 6H-SiC diaphragms
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