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Mechanical behavior of laser micro-machined bulk 6H-SiC diaphragms

Simsek, E. / Buehler, M. / Pecholt, B. / Molian, P.

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Mechanical behavior of laser micro-machined bulk 6H-SiC diaphragms

Simsek, E. / Buehler, M. / Pecholt, B. / Molian, P.

Mechanical behavior of laser micro-machined bulk 6H-SiC diaphragms

Simsek, E. / Buehler, M. / Pecholt, B. / Molian, P.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Mechanical behavior of laser micro-machined bulk 6H-SiC diaphragms

Contributors:

Simsek, E. (author) / Buehler, M. (author) / Pecholt, B. (author) / Molian, P. (author)

Published in:

MATERIALS AND DESIGN -REIGATE- ; 31 ; 3605-3609

Publication date:

2010-01-01

Size:

5 pages

ISSN:

0264-1275

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.0042

Simsek, Emrah / Buehler, Michelle / Pecholt, Ben et al. | Elsevier | 2010

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