Measurement and optimization on the energy consumption of fans in semiconductor cleanrooms: Fid-Bau Portal

Measurement and optimization on the energy consumption of fans in semiconductor cleanrooms

Ma, Zhiyao / Liu, Xiaohua / Zhang, Tao

Abstract The semiconductor cleanrooms consume lots of fan power energy for the demand of indoor thermal and cleanliness environment. Therefore, this study focuses on the performance of the ventilation system in semiconductor cleanrooms and its relationship with the heating/cooling process, filtration process, and indoor cleanliness conditions. On-site measurements were conducted in four semiconductor cleanrooms to investigate the factors that affect the ventilation power consumption. The results indicate that the pressure drop of the make-up unit (MAU) system often exceeds 1000 Pa, and the cooling, heating and humidification coils account for 31.0%–41.9% of the resistance. Large airflow rates are the main factor that leads to high energy consumption of the fan filter unit (FFU) system. Therefore, optimization approaches of the ventilation system are proposed to investigate the energy saving potentials. The arrangement of the coils is improved by combing some coils together depending on the outdoor air-treatment process, and the pressure drop in the MAU system reduces by 10.7%–17.2%. The reduction of the return airflow rate is also discussed in the research and it shows significant energy saving potentials of the FFU system.

Highlights • The actual ventilation performance in semiconductor cleanrooms is analyzed. • The pressure drop of MAU system and airflow rate of FFU system are the determining factor of the ventilation consumption. • The improvement of coil arrangement is proposed to reduce the pressure drop of MAU system by 10.7%–17.2%. • Return airflow reduction is analyzed to save up to 29.0% of the FFU consumption.