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A platform for research: civil engineering, architecture and urbanism
Study on Energy Consumption Influencing Factors of HVAC Systems for Cleanrooms in Semiconductor Fabs
To maintain ultra-high air cleanliness, the air changes per hour can be several hundred in semiconductor fabrication plants (fabs) cleanrooms, making HVAC systems for cleanrooms dozens of times more energy intensive than those for public buildings. The study aims to identify the significant energy consumption influencing factors of HVAC systems for cleanrooms and their significance ranking, providing the direction and basis for energy conservation of semiconductor fabs. First, this study compiled 10 primary energy consumption influencing factors using theoretical analysis. Then, the energy consumption of each influencing factor was simulated using a Design Builder model of a semiconductor manufacturing facility at various values. Furthermore, the significance ranking of the 10 influencing factors was also determined using single-factor analysis, orthogonal experiments, and variance analysis. Results show that the significant energy consumption influencing factors are total air changes and COP of chillers. The significance ranking is air changes per hour > COP of chillers > supply air temperature of MAU > outdoor air flow rate > fan efficiency > pump efficiency > process efficiency > lighting equipment efficiency > heat transfer coefficient of roof > heat transfer coefficient of external wall. This study is instructive for the proposal of energy conservation strategies and estimating energy savings.
Study on Energy Consumption Influencing Factors of HVAC Systems for Cleanrooms in Semiconductor Fabs
To maintain ultra-high air cleanliness, the air changes per hour can be several hundred in semiconductor fabrication plants (fabs) cleanrooms, making HVAC systems for cleanrooms dozens of times more energy intensive than those for public buildings. The study aims to identify the significant energy consumption influencing factors of HVAC systems for cleanrooms and their significance ranking, providing the direction and basis for energy conservation of semiconductor fabs. First, this study compiled 10 primary energy consumption influencing factors using theoretical analysis. Then, the energy consumption of each influencing factor was simulated using a Design Builder model of a semiconductor manufacturing facility at various values. Furthermore, the significance ranking of the 10 influencing factors was also determined using single-factor analysis, orthogonal experiments, and variance analysis. Results show that the significant energy consumption influencing factors are total air changes and COP of chillers. The significance ranking is air changes per hour > COP of chillers > supply air temperature of MAU > outdoor air flow rate > fan efficiency > pump efficiency > process efficiency > lighting equipment efficiency > heat transfer coefficient of roof > heat transfer coefficient of external wall. This study is instructive for the proposal of energy conservation strategies and estimating energy savings.
Study on Energy Consumption Influencing Factors of HVAC Systems for Cleanrooms in Semiconductor Fabs
Lecture Notes in Civil Engineering
Kang, Thomas (editor) / Chen, Yiling (author) / Li, Nan (author) / Zhao, Yu (author) / Zhao, Wei (author)
International Conference on Civil Engineering and Architecture ; 2022 ; Hanoi, Vietnam
Proceedings of 5th International Conference on Civil Engineering and Architecture ; Chapter: 66 ; 861-873
2023-10-01
13 pages
Article/Chapter (Book)
Electronic Resource
English
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