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Materials selection for micro-electromechanical systems
AbstractMaterials selection is essential for efficient design of various systems, like micro-electromechanical systems (MEMS). The rapid expansion of the field of MEMS motivates the search for efficient materials. We apply the Ashby methodology to select materials suitable for applications in a particular class of MEMS, namely RF-MEMS. In a first step, the selection deals with the minimization of intrinsic residual stresses for thin films deposited by the evaporation process. In a second step, the selection is based on the search of materials having a high pull-in tension and a high quality factor for the bridge of RF-MEMS.
Materials selection for micro-electromechanical systems
AbstractMaterials selection is essential for efficient design of various systems, like micro-electromechanical systems (MEMS). The rapid expansion of the field of MEMS motivates the search for efficient materials. We apply the Ashby methodology to select materials suitable for applications in a particular class of MEMS, namely RF-MEMS. In a first step, the selection deals with the minimization of intrinsic residual stresses for thin films deposited by the evaporation process. In a second step, the selection is based on the search of materials having a high pull-in tension and a high quality factor for the bridge of RF-MEMS.
Materials selection for micro-electromechanical systems
Guisbiers, G. (author) / Wautelet, M. (author)
2005-05-10
3 pages
Article (Journal)
Electronic Resource
English
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