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    Micro-electromechanical systems based on 3C-SiC/Si heterostructures

    New search for: Förster, C.
    New search for: Cimalla, V.
    New search for: Brückner, K.
    New search for: Hein, M.
    New search for: Pezoldt, J.
    New search for: Ambacher, O.

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    Micro-electromechanical systems based on 3C-SiC/Si heterostructures

    New search for: Förster, C.
    New search for: Cimalla, V.
    New search for: Brückner, K.
    New search for: Hein, M.
    New search for: Pezoldt, J.
    New search for: Ambacher, O.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Micro-electromechanical systems based on 3C-SiC/Si heterostructures

    New search for: Förster, C.
    New search for: Cimalla, V.
    New search for: Brückner, K.
    New search for: Hein, M.
    New search for: Pezoldt, J.
    New search for: Ambacher, O.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

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    Document information
    Title:

    Micro-electromechanical systems based on 3C-SiC/Si heterostructures

    Contributors:

    Förster, C. (author) / Cimalla, V. (author) / Brückner, K. (author) / Hein, M. (author) / Pezoldt, J. (author) / Ambacher, O. (author)

    Published in:

    MATERIALS SCIENCE AND ENGINEERING -AMSTERDAM THEN LAUSANNE- C ; 25 ; 804-808

    Publication date:

    2005-01-01

    Size:

    5 pages

    ISSN:

    0928-4931

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.1 / 660

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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