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Potassium-sodium niobate ceramic target material for sputtering and preparation method thereof
The invention relates to a potassium-sodium niobate ceramic target material for sputtering and a preparation method thereof. The chemical composition of the ceramic target material is (KxNay)NbO3, wherein x is greater than or equal to 0.50 and is smaller than or equal to 0.65, y is greater than or equal to 0.50 and is smaller than or equal to 0.65, and the sum of x and y is greater than 1. By solving the problem of moisture absorption and selecting an appropriate adhesive, a large-size ceramic target material for sputtering, which is perfect, compact and crack-free and contains excess K and Na, is obtained; moreover, excess components in the target material can compensate the losses of the K and the Na in a film sputtering process, and the chemical composition of a KNN film is regulated, so that the electrical performance of the KNN film is improved. The preparation method plays an important role in preparation of the component-controllable KNN film through a magnetron sputtering method.
Potassium-sodium niobate ceramic target material for sputtering and preparation method thereof
The invention relates to a potassium-sodium niobate ceramic target material for sputtering and a preparation method thereof. The chemical composition of the ceramic target material is (KxNay)NbO3, wherein x is greater than or equal to 0.50 and is smaller than or equal to 0.65, y is greater than or equal to 0.50 and is smaller than or equal to 0.65, and the sum of x and y is greater than 1. By solving the problem of moisture absorption and selecting an appropriate adhesive, a large-size ceramic target material for sputtering, which is perfect, compact and crack-free and contains excess K and Na, is obtained; moreover, excess components in the target material can compensate the losses of the K and the Na in a film sputtering process, and the chemical composition of a KNN film is regulated, so that the electrical performance of the KNN film is improved. The preparation method plays an important role in preparation of the component-controllable KNN film through a magnetron sputtering method.
Potassium-sodium niobate ceramic target material for sputtering and preparation method thereof
DONG XIANLIN (author) / LI TAO (author) / WANG GENSHUI (author) / CHEN YING (author)
2015-04-29
Patent
Electronic Resource
English
IPC:
C04B
Kalk
,
LIME
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