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High-purity alumina precision ceramic part for semiconductor equipment
The invention discloses a high-purity alumina precision ceramic part for semiconductor equipment, and the high-purity alumina precision ceramic part is used for solving the product deformation problems, such as thread no-go-gauge and go-gauge, due to the fact that the precision ceramic part is processed through the traditional hot pressure-casting forming and injection forming method. According to the high-purity alumina precision ceramic part disclosed by the invention, a cold isostatic pressure forming process is adopted; the forming shrinkage ratio and the sintering shrinkage ratio are precisely controlled; processing of the ceramic part is completed for one time through a processing method for processing a blank before sintering in place by directly utilizing a numerical control lathe and then sintering; a product unnecessary to sinter is finished, so that the thread tolerance of the ceramic part is within +/- 0.03 mm; furthermore, the blank of production of the ceramic part for the semiconductor equipment in China is filled.
High-purity alumina precision ceramic part for semiconductor equipment
The invention discloses a high-purity alumina precision ceramic part for semiconductor equipment, and the high-purity alumina precision ceramic part is used for solving the product deformation problems, such as thread no-go-gauge and go-gauge, due to the fact that the precision ceramic part is processed through the traditional hot pressure-casting forming and injection forming method. According to the high-purity alumina precision ceramic part disclosed by the invention, a cold isostatic pressure forming process is adopted; the forming shrinkage ratio and the sintering shrinkage ratio are precisely controlled; processing of the ceramic part is completed for one time through a processing method for processing a blank before sintering in place by directly utilizing a numerical control lathe and then sintering; a product unnecessary to sinter is finished, so that the thread tolerance of the ceramic part is within +/- 0.03 mm; furthermore, the blank of production of the ceramic part for the semiconductor equipment in China is filled.
High-purity alumina precision ceramic part for semiconductor equipment
MA YUQI (author) / CAI DEQI (author) / YAO XIANGMIN (author)
2015-05-27
Patent
Electronic Resource
English
IPC:
C04B
Kalk
,
LIME
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