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Preparation method of high density BNT target for magnetron sputtering
The present invention discloses a preparation method of a high density BNT target for magnetron sputtering. The method comprises: adopting Bi2O3, Na2CO3 and TiO2 as raw materials, and preparing the materials according to the BNT target molecular formula Bi0.5Na0.5TiO3; carrying out primary ball milling, pre-firing at a temperature of 700-900 DEG C, adding 0.5-1 wt% of a plasticizing agent PVA to the raw materials, and carrying out secondary ball milling; and drying, screening, carrying out pressing molding to obtain a ceramic green compact, discharging the glue, and sintering at a temperature of 950-1100 DEG C to prepare the BNT target. According to the present invention, the solid phase method is firstly used to prepare the material, the diameter of the target before sintering/after sintering is 100 mm/76 mm, the shrinkage rate is 24%, and the bulk density is 5.59 g/cm<3>.
Preparation method of high density BNT target for magnetron sputtering
The present invention discloses a preparation method of a high density BNT target for magnetron sputtering. The method comprises: adopting Bi2O3, Na2CO3 and TiO2 as raw materials, and preparing the materials according to the BNT target molecular formula Bi0.5Na0.5TiO3; carrying out primary ball milling, pre-firing at a temperature of 700-900 DEG C, adding 0.5-1 wt% of a plasticizing agent PVA to the raw materials, and carrying out secondary ball milling; and drying, screening, carrying out pressing molding to obtain a ceramic green compact, discharging the glue, and sintering at a temperature of 950-1100 DEG C to prepare the BNT target. According to the present invention, the solid phase method is firstly used to prepare the material, the diameter of the target before sintering/after sintering is 100 mm/76 mm, the shrinkage rate is 24%, and the bulk density is 5.59 g/cm<3>.
Preparation method of high density BNT target for magnetron sputtering
LI LINGXIA (author) / ZHENG HAORAN (author) / SUN ZHENG (author) / LUO WEIJIA (author) / YU SHIHUI (author)
2015-11-18
Patent
Electronic Resource
English
IPC:
C04B
Kalk
,
LIME
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