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The invention discloses a preparation method of a conductive lithium tantalate target material for magnetron sputtering, relates to the field of sputtering target materials, and aims to provide the conductive lithium tantalate target material for magnetron sputtering, and the preparation method of the conductive lithium tantalate target material for magnetron sputtering is characterized by comprising the following steps: S1, preparing C powder, Ta2O5 powder and Li2CO3 powder; s2, weighing the powder, adding the powder into deionized water to form slurry, sanding and crushing, and performing centrifugal spray granulation; s3, carrying out pre-sintering; s4, weighing the pre-sintered reduced powder and Li2CO3 powder, adding the weighed powder and Li2CO3 powder into deionized water to form slurry, sanding and crushing the slurry, and performing centrifugal spray granulation; s5, the granulated powder is pre-sintered again, and reduced powder is obtained; s6, screening after crushing; s7, pre-pressing is conducted, and sintering is conducted; s8, vacuum annealing is conducted; and S9, after annealing is completed, machining is conducted, and the requirements of the product are met. According to the preparation method of the conductive lithium tantalate target material for magnetron sputtering, the lithium tantalate conductive target material with high density, high purity, fine grain and near stoichiometric ratio can be prepared.
本发明公开了一种磁控溅射用导电钽酸锂靶材的制备方法，涉及溅射靶材领域，旨在提供一种磁控溅射用导电钽酸锂靶材，其技术方案要点是：S1：配置C粉、Ta2O5粉末、Li2CO3粉末；S2：将粉末称重后加入到去离子水中形成浆液，进行砂磨破碎，离心喷雾造粒；S3：进行预烧结；S4：将预烧后的还原粉末与Li2CO3粉末称重后加入到去离子水中形成浆液，进行砂磨破碎，进行离心喷雾造粒；S5：对造粒后的粉末再次进行预烧结，得到还原粉末；S6：破碎后筛分；S7：预压，进行烧结；S8：真空退火；S9：退火完成后进行机加工完成产品所需要求。本发明的一种磁控溅射用导电钽酸锂靶材的制备方法可制备出高致密度、高纯度、细晶、近化学计量比的钽酸锂导电靶材。
The invention discloses a preparation method of a conductive lithium tantalate target material for magnetron sputtering, relates to the field of sputtering target materials, and aims to provide the conductive lithium tantalate target material for magnetron sputtering, and the preparation method of the conductive lithium tantalate target material for magnetron sputtering is characterized by comprising the following steps: S1, preparing C powder, Ta2O5 powder and Li2CO3 powder; s2, weighing the powder, adding the powder into deionized water to form slurry, sanding and crushing, and performing centrifugal spray granulation; s3, carrying out pre-sintering; s4, weighing the pre-sintered reduced powder and Li2CO3 powder, adding the weighed powder and Li2CO3 powder into deionized water to form slurry, sanding and crushing the slurry, and performing centrifugal spray granulation; s5, the granulated powder is pre-sintered again, and reduced powder is obtained; s6, screening after crushing; s7, pre-pressing is conducted, and sintering is conducted; s8, vacuum annealing is conducted; and S9, after annealing is completed, machining is conducted, and the requirements of the product are met. According to the preparation method of the conductive lithium tantalate target material for magnetron sputtering, the lithium tantalate conductive target material with high density, high purity, fine grain and near stoichiometric ratio can be prepared.
本发明公开了一种磁控溅射用导电钽酸锂靶材的制备方法，涉及溅射靶材领域，旨在提供一种磁控溅射用导电钽酸锂靶材，其技术方案要点是：S1：配置C粉、Ta2O5粉末、Li2CO3粉末；S2：将粉末称重后加入到去离子水中形成浆液，进行砂磨破碎，离心喷雾造粒；S3：进行预烧结；S4：将预烧后的还原粉末与Li2CO3粉末称重后加入到去离子水中形成浆液，进行砂磨破碎，进行离心喷雾造粒；S5：对造粒后的粉末再次进行预烧结，得到还原粉末；S6：破碎后筛分；S7：预压，进行烧结；S8：真空退火；S9：退火完成后进行机加工完成产品所需要求。本发明的一种磁控溅射用导电钽酸锂靶材的制备方法可制备出高致密度、高纯度、细晶、近化学计量比的钽酸锂导电靶材。
Preparation method of conductive lithium tantalate target material for magnetron sputtering
一种磁控溅射用导电钽酸锂靶材的制备方法
2023-04-18
Patent
Electronic Resource
Chinese
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