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Carbon-ceramic composite heater and preparation method
The invention discloses a preparation method of a carbon-ceramic composite material heater for a single crystal furnace, which is uniform in silicon carbide distribution and low in preparation cost. The preparation method comprises the following steps: (1) preparing ceramic slurry; (2) preparing a carbon-ceramic composite material heater wet blank; (3) preparing a carbon-ceramic composite materialheater dry blank; (4) performing rough machining; (5) performing vapor deposition; and (6) performing finish machining; according to the invention, the ceramic powder and a lubricant comprising graphite powder or graphene are introduced into the carbon fiber preform in a physical manner at room temperature, and the carbon-ceramic composite material heater is prepared after vapor deposition, and has the characteristics of simple process, short production period, low preparation cost, good conductivity and the like; the resistivity of the carbon-ceramic composite material can be well controlledby adjusting the content of ceramic in the carbon-ceramic composite material, the open porosity of the prepared carbon-ceramic composite material heater is 1%-9%, the density of the prepared carbon-ceramic composite material heater is 1.5 g/cm <3>-2.3 g/cm <3>, the bending strength of the prepared carbon-ceramic composite material heater is 250-480 MPa, and the resistivity of the prepared carbon-ceramic composite material heater is 10-300 microohm m.
本发明公开了一种碳化硅分布均匀、制备成本低的单晶炉用碳陶复合材料加热器制备方法，它包括以下步骤：⑴制备陶瓷浆料；⑵制备碳陶复合材料加热器湿坯；⑶制备碳陶复合材料加热器干坯；⑷粗加工；⑸气相沉积；⑹精加工；本发明实现了在室温下通过物理方式将陶瓷粉体及包括石墨粉或石墨烯的润滑剂引入到碳纤维预制体中，经气相沉积后制备得碳陶复合材料加热器，具有工艺简单，生产周期短，制备成本低，导电性能好等特点；通过调整碳陶复合材料内陶瓷含量，能很好的控制碳陶复合材料的电阻率；制备的碳陶复合材料加热器的开气孔率为1﹪～9﹪，密度为1.5g/㎝～2.3g/㎝，抗弯强度为250MPa～480MPa，电阻率为10μΩ•m～300μΩ•m。
Carbon-ceramic composite heater and preparation method
The invention discloses a preparation method of a carbon-ceramic composite material heater for a single crystal furnace, which is uniform in silicon carbide distribution and low in preparation cost. The preparation method comprises the following steps: (1) preparing ceramic slurry; (2) preparing a carbon-ceramic composite material heater wet blank; (3) preparing a carbon-ceramic composite materialheater dry blank; (4) performing rough machining; (5) performing vapor deposition; and (6) performing finish machining; according to the invention, the ceramic powder and a lubricant comprising graphite powder or graphene are introduced into the carbon fiber preform in a physical manner at room temperature, and the carbon-ceramic composite material heater is prepared after vapor deposition, and has the characteristics of simple process, short production period, low preparation cost, good conductivity and the like; the resistivity of the carbon-ceramic composite material can be well controlledby adjusting the content of ceramic in the carbon-ceramic composite material, the open porosity of the prepared carbon-ceramic composite material heater is 1%-9%, the density of the prepared carbon-ceramic composite material heater is 1.5 g/cm <3>-2.3 g/cm <3>, the bending strength of the prepared carbon-ceramic composite material heater is 250-480 MPa, and the resistivity of the prepared carbon-ceramic composite material heater is 10-300 microohm m.
本发明公开了一种碳化硅分布均匀、制备成本低的单晶炉用碳陶复合材料加热器制备方法，它包括以下步骤：⑴制备陶瓷浆料；⑵制备碳陶复合材料加热器湿坯；⑶制备碳陶复合材料加热器干坯；⑷粗加工；⑸气相沉积；⑹精加工；本发明实现了在室温下通过物理方式将陶瓷粉体及包括石墨粉或石墨烯的润滑剂引入到碳纤维预制体中，经气相沉积后制备得碳陶复合材料加热器，具有工艺简单，生产周期短，制备成本低，导电性能好等特点；通过调整碳陶复合材料内陶瓷含量，能很好的控制碳陶复合材料的电阻率；制备的碳陶复合材料加热器的开气孔率为1﹪～9﹪，密度为1.5g/㎝～2.3g/㎝，抗弯强度为250MPa～480MPa，电阻率为10μΩ•m～300μΩ•m。
Carbon-ceramic composite heater and preparation method
碳陶复合材料加热器及制备方法
LIAO JIQIAO (author) / SHI LEI (author) / DENG HUAFENG (author) / LI BINGJU (author) / LI JUN (author) / WANG BINGQUAN (author) / PENG XINHUI (author) / LIU XUEWEN (author) / WANG YUEJUN (author) / GONG YULIANG (author)
2020-04-17
Patent
Electronic Resource
Chinese
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