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Method for improving wettability of aluminum to aluminum oxide ceramic
The invention provides a method for improving wettability of aluminum to aluminum oxide ceramic, which comprises the following steps of polishing the surface of the aluminum oxide ceramic, and puttingthe aluminum oxide ceramic in a vacuum chamber, pre-pumping the air pressure of the back bottom of the vacuum chamber, and heating the aluminum oxide ceramic, after the aluminum oxide ceramic is cooled to the room temperature, introducing argon into the vacuum chamber, and keeping the pressure intensity, when magnetron sputtering is carried out on the aluminum oxide ceramic, controlling an aluminum target by a direct-current cathode to obtain an aluminum layer, adopting a copper target on the surface of the aluminum layer to be controlled by a radio frequency cathode, and acquiring a copper layer. In the whole film deposition process, the aluminum oxide ceramic substrate is not heated and negative bias voltage is not applied. According to the method, the aluminum/copper double-layer filmis deposited on the surface of the aluminum oxide ceramic through a magnetron sputtering method, so that the wettability of aluminum or aluminum alloy to the aluminum oxide ceramic is improved; by utilizing the method disclosed by the invention, direct wetting of aluminum to the aluminum oxide ceramic is realized, no reaction transition layer exists at a wetting interface, and high interface strength can be obtained, so that the mechanical property of the composite material is improved.
本发明提供了一种改善铝对氧化铝陶瓷润湿性的方法，其包括：先对氧化铝陶瓷表面进行抛光处理，再放置真空室内；将真空室的背底气压预抽，并将氧化铝陶瓷加热；待氧化铝陶瓷降至室温后，对真空室充入氩气，并保持压强；对氧化铝陶瓷进行磁控溅射时，先采用铝靶由直流阴极控制，得到铝层；在铝层的表面再采用铜靶由射频阴极控制，得到铜层，整个薄膜沉积过程中，氧化铝陶瓷基片不加热也不施加负偏压；本发明通过磁控溅射的方法在氧化铝陶瓷表面沉积铝/铜双层膜，从而改善了铝或铝合金对氧化铝陶瓷的润湿性；利用本发明的方法实现了铝对氧化铝陶瓷的直接润湿，润湿界面处不存在任何反应过渡层，可获得高的界面强度，从而提高复合材料的力学性能。
Method for improving wettability of aluminum to aluminum oxide ceramic
The invention provides a method for improving wettability of aluminum to aluminum oxide ceramic, which comprises the following steps of polishing the surface of the aluminum oxide ceramic, and puttingthe aluminum oxide ceramic in a vacuum chamber, pre-pumping the air pressure of the back bottom of the vacuum chamber, and heating the aluminum oxide ceramic, after the aluminum oxide ceramic is cooled to the room temperature, introducing argon into the vacuum chamber, and keeping the pressure intensity, when magnetron sputtering is carried out on the aluminum oxide ceramic, controlling an aluminum target by a direct-current cathode to obtain an aluminum layer, adopting a copper target on the surface of the aluminum layer to be controlled by a radio frequency cathode, and acquiring a copper layer. In the whole film deposition process, the aluminum oxide ceramic substrate is not heated and negative bias voltage is not applied. According to the method, the aluminum/copper double-layer filmis deposited on the surface of the aluminum oxide ceramic through a magnetron sputtering method, so that the wettability of aluminum or aluminum alloy to the aluminum oxide ceramic is improved; by utilizing the method disclosed by the invention, direct wetting of aluminum to the aluminum oxide ceramic is realized, no reaction transition layer exists at a wetting interface, and high interface strength can be obtained, so that the mechanical property of the composite material is improved.
本发明提供了一种改善铝对氧化铝陶瓷润湿性的方法，其包括：先对氧化铝陶瓷表面进行抛光处理，再放置真空室内；将真空室的背底气压预抽，并将氧化铝陶瓷加热；待氧化铝陶瓷降至室温后，对真空室充入氩气，并保持压强；对氧化铝陶瓷进行磁控溅射时，先采用铝靶由直流阴极控制，得到铝层；在铝层的表面再采用铜靶由射频阴极控制，得到铜层，整个薄膜沉积过程中，氧化铝陶瓷基片不加热也不施加负偏压；本发明通过磁控溅射的方法在氧化铝陶瓷表面沉积铝/铜双层膜，从而改善了铝或铝合金对氧化铝陶瓷的润湿性；利用本发明的方法实现了铝对氧化铝陶瓷的直接润湿，润湿界面处不存在任何反应过渡层，可获得高的界面强度，从而提高复合材料的力学性能。
Method for improving wettability of aluminum to aluminum oxide ceramic
改善铝对氧化铝陶瓷润湿性的方法
SHANG HAILONG (author) / RAN ZHUN (author) / QI XIAOBEN (author) / DU HAOMING (author) / GUO LEYANG (author) / MA BINGYANG (author)
2020-06-19
Patent
Electronic Resource
Chinese
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