A platform for research: civil engineering, architecture and urbanism
A platform for research: civil engineering, architecture and urbanism
Ternary relaxor ferroelectric film material as well as preparation method and application thereof
The invention relates to a ternary relaxor ferroelectric film material as well as preparation and application thereof. The chemical composition of the material is (1-x-y) Pb (In<1/2>Nb<1/2>)O<3-y>Pb(Mg<1/3>Nb<2/3>)O<3-x>PbTiO<3-z>Mn, wherein x=0.20-0.40, y=0.18-0.60, z=0.003-0.03; the preparation method comprises the following steps: (a) mixing MnO2, In2O3, Nb2O5, MgO, PbO and TiO2, and then sequentially carrying out ball milling, drying, sieving, presintering, granulating, tabletting and sintering, so as to obtain an Mn-PIN-PMN-PT ceramic target material; (b) sequentially putting SrTiO3 single crystal into acetone, ethanol and deionized water for ultrasonic washing, and then drying to obtain a substrate; (c) carrying out deposition treatment on the SrRuO3 ceramic target on the substrate in a laser sputtering mode, and then carrying out annealing treatment to obtain a bottom electrode; and (d) carrying out deposition treatment of the Mn-PIN-PMN-PT ceramic target material on the bottomelectrode in a laser sputtering mode, and then carrying out annealing treatment to obtain the thin film material. Compared with the prior art, the film provided by the invention has a pure perovskitestructure, excellent ferroelectric and piezoelectric properties, and relatively high Curie temperature and trigonal-tetragonal phase transition temperature.
本发明涉及一种三元系弛豫铁电薄膜材料及其制备和应用，材料的化学组成为(1‑x‑y)Pb(InNb)O‑yPb(MgNb)O‑xPbTiO‑zMn，其中x＝0.20～0.40，y＝0.18～0.60，z＝0.003～0.03，包括以下步骤：(a)将MnO、InO、NbO、MgO、PbO和TiO混合，后依次进行球磨、烘干、过筛、预烧、造粒、压片和烧结，得到Mn‑PIN‑PMN‑PT陶瓷靶材；(b)将SrTiO单晶依次置于丙酮、乙醇和去离子水中进行超声洗涤，后干燥，得到衬底；(c)以激光溅射的方式，将SrRuO陶瓷靶在衬底上进行沉积处理，后进行退火处理，得到底电极；(d)以激光溅射的方式，将Mn‑PIN‑PMN‑PT陶瓷靶材在底电极有上进行沉积处理，后进行退火处理，得到薄膜材料。与现有技术相比，本发明的薄膜具有纯钙钛矿结构，且具有优异的铁电和压电性能，以及较高的居里温度和三方‑四方相变温度。
Ternary relaxor ferroelectric film material as well as preparation method and application thereof
The invention relates to a ternary relaxor ferroelectric film material as well as preparation and application thereof. The chemical composition of the material is (1-x-y) Pb (In<1/2>Nb<1/2>)O<3-y>Pb(Mg<1/3>Nb<2/3>)O<3-x>PbTiO<3-z>Mn, wherein x=0.20-0.40, y=0.18-0.60, z=0.003-0.03; the preparation method comprises the following steps: (a) mixing MnO2, In2O3, Nb2O5, MgO, PbO and TiO2, and then sequentially carrying out ball milling, drying, sieving, presintering, granulating, tabletting and sintering, so as to obtain an Mn-PIN-PMN-PT ceramic target material; (b) sequentially putting SrTiO3 single crystal into acetone, ethanol and deionized water for ultrasonic washing, and then drying to obtain a substrate; (c) carrying out deposition treatment on the SrRuO3 ceramic target on the substrate in a laser sputtering mode, and then carrying out annealing treatment to obtain a bottom electrode; and (d) carrying out deposition treatment of the Mn-PIN-PMN-PT ceramic target material on the bottomelectrode in a laser sputtering mode, and then carrying out annealing treatment to obtain the thin film material. Compared with the prior art, the film provided by the invention has a pure perovskitestructure, excellent ferroelectric and piezoelectric properties, and relatively high Curie temperature and trigonal-tetragonal phase transition temperature.
本发明涉及一种三元系弛豫铁电薄膜材料及其制备和应用，材料的化学组成为(1‑x‑y)Pb(InNb)O‑yPb(MgNb)O‑xPbTiO‑zMn，其中x＝0.20～0.40，y＝0.18～0.60，z＝0.003～0.03，包括以下步骤：(a)将MnO、InO、NbO、MgO、PbO和TiO混合，后依次进行球磨、烘干、过筛、预烧、造粒、压片和烧结，得到Mn‑PIN‑PMN‑PT陶瓷靶材；(b)将SrTiO单晶依次置于丙酮、乙醇和去离子水中进行超声洗涤，后干燥，得到衬底；(c)以激光溅射的方式，将SrRuO陶瓷靶在衬底上进行沉积处理，后进行退火处理，得到底电极；(d)以激光溅射的方式，将Mn‑PIN‑PMN‑PT陶瓷靶材在底电极有上进行沉积处理，后进行退火处理，得到薄膜材料。与现有技术相比，本发明的薄膜具有纯钙钛矿结构，且具有优异的铁电和压电性能，以及较高的居里温度和三方‑四方相变温度。
Ternary relaxor ferroelectric film material as well as preparation method and application thereof
一种三元系弛豫铁电薄膜材料及其制备方法和应用
WANG FEIFEI (author) / LI ZIHAO (author) / WANG YUCHUN (author) / ZHAO XIANGYONG (author) / WANG TAO (author) / TANG YANXUE (author) / DUAN ZHIHUA (author) / SHI WANGZHOU (author)
2020-07-17
Patent
Electronic Resource
Chinese
| European Patent Office | 2024
Lead-free relaxor ferroelectric ceramic material and preparation method thereof
| European Patent Office | 2021
| European Patent Office | 2024
Layered composite lead-free relaxor ferroelectric material and preparation method thereof
| European Patent Office | 2024