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A platform for research: civil engineering, architecture and urbanism
Low-angle illumination tiny dust cleaning device for clean room and clean room with device
The invention discloses a low-angle illumination tiny dust cleaning device for a clean room, which is used for being guided into a negative pressure environment to suck tiny dust in an operation space, and comprises a main body connected with the negative pressure environment; a light source suction nozzle assembly comprising a suction nozzle which is connected with the main body and connected with the negative pressure environment, wherein the suction nozzle is provided with a ventilation body and a suction head end, and an opening is formed in the suction head end and is used for sucking tiny dust at a suction working area corresponding to the opening in the operation space, and a group of low-angle light sources for irradiating the suction working area at a low angle is provided; and adusting device corresponding to the suction nozzle, and when the tiny dust is attached to one working surface of the operation space, the tiny dust is driven away from the working surface by non-contact force so as to be sucked by the suction nozzle. In addition, the invention further discloses a clean room with the low-angle illumination tiny dust cleaning device.
本发明公开了一种洁净室用低角度光照微尘清洁装置，供导入一负压环境而吸取一操作空间中的微尘，该低角度光照微尘清洁装置包括：一主体，连结上述负压环境；一光源吸嘴组件，包括一链接上述主体并导接上述负压环境的吸嘴，该吸嘴具有一通气本体及吸头端，该吸头端形成有一开口，供吸取上述操作空间中对应上述开口的一吸取工作区处的微尘，及一组以低角度照射上述吸取工作区的低角度光源；及一对应上述吸嘴的起尘装置，当上述微尘是附着于上述操作空间之一工作表面时，将上述微尘以非接触力驱离上述工作表面供上述吸嘴吸取。此外，本发明还公开了具有前述低角度光照微尘清洁装置的洁净室。
Low-angle illumination tiny dust cleaning device for clean room and clean room with device
The invention discloses a low-angle illumination tiny dust cleaning device for a clean room, which is used for being guided into a negative pressure environment to suck tiny dust in an operation space, and comprises a main body connected with the negative pressure environment; a light source suction nozzle assembly comprising a suction nozzle which is connected with the main body and connected with the negative pressure environment, wherein the suction nozzle is provided with a ventilation body and a suction head end, and an opening is formed in the suction head end and is used for sucking tiny dust at a suction working area corresponding to the opening in the operation space, and a group of low-angle light sources for irradiating the suction working area at a low angle is provided; and adusting device corresponding to the suction nozzle, and when the tiny dust is attached to one working surface of the operation space, the tiny dust is driven away from the working surface by non-contact force so as to be sucked by the suction nozzle. In addition, the invention further discloses a clean room with the low-angle illumination tiny dust cleaning device.
本发明公开了一种洁净室用低角度光照微尘清洁装置，供导入一负压环境而吸取一操作空间中的微尘，该低角度光照微尘清洁装置包括：一主体，连结上述负压环境；一光源吸嘴组件，包括一链接上述主体并导接上述负压环境的吸嘴，该吸嘴具有一通气本体及吸头端，该吸头端形成有一开口，供吸取上述操作空间中对应上述开口的一吸取工作区处的微尘，及一组以低角度照射上述吸取工作区的低角度光源；及一对应上述吸嘴的起尘装置，当上述微尘是附着于上述操作空间之一工作表面时，将上述微尘以非接触力驱离上述工作表面供上述吸嘴吸取。此外，本发明还公开了具有前述低角度光照微尘清洁装置的洁净室。
Low-angle illumination tiny dust cleaning device for clean room and clean room with device
洁净室用低角度光照微尘清洁装置及具有该装置的洁净室
YANG ZHIYI (author) / KONDOU HIROHITO (author)
2020-10-27
Patent
Electronic Resource
Chinese
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| European Patent Office | 2024