A platform for research: civil engineering, architecture and urbanism
A platform for research: civil engineering, architecture and urbanism
The invention discloses a device and a method for replacing a component in a vacuum chamber. The device comprises a vacuum cavity and a buffer cavity, wherein the vacuum cavity and the buffer cavity are separated through a partition plate, the partition plate comprises a through hole, a sliding rail, a door plate capable of sliding in the sliding rail and covering the through hole, telescopic lockcatches evenly distributed on the edge of the through hole and a control center connected with the lock catches and the door plate, each lock catch comprises a telescopic shaft and a locking shaft which are vertically arranged, each locking shaft is located at one end of the corresponding telescopic shaft, the other end of each telescopic shaft is embedded in the partition plate, the door plate and the locking shafts are located on the same side of the through hole, the buffer cavity comprises a gripper and a replacement component, and when the component in the vacuum cavity needs to be replaced, the buffer cavity is in the same vacuum state as the vacuum cavity, and the gripper replaces the component in the vacuum cavity with the replacement component in the buffer cavity. The device andthe method for replacing the component in the vacuum cavity can reduce the downtime and improve the utilization rate of equipment.
本发明公开了一种真空腔中器件的更换装置，包括真空腔和缓冲腔，所述真空腔和缓冲腔之间通过隔板隔开，所述隔板上包括通孔、滑轨、可在滑轨中滑动且能够覆盖通孔的门板、均匀分布在通孔边上的可伸缩的锁扣、以及连接锁扣和门板的控制中心，所述锁扣包括垂直设置的伸缩轴和锁紧轴，所述锁紧轴位于所述伸缩轴的一端，所述伸缩轴的另一端嵌入在所述隔板中，所述门板与所述锁紧轴位于所述通孔的同一侧，所述缓冲腔中包含抓手和替换器件，当真空腔中器件需要被替换时，所述缓冲腔处于与真空腔相同的真空状态，所述抓手用缓冲腔中替换器件替换真空腔中器件。本发明公开了一种真空腔中器件的更换装置和方法，可以减少停机时间，提高设备的利用率。
The invention discloses a device and a method for replacing a component in a vacuum chamber. The device comprises a vacuum cavity and a buffer cavity, wherein the vacuum cavity and the buffer cavity are separated through a partition plate, the partition plate comprises a through hole, a sliding rail, a door plate capable of sliding in the sliding rail and covering the through hole, telescopic lockcatches evenly distributed on the edge of the through hole and a control center connected with the lock catches and the door plate, each lock catch comprises a telescopic shaft and a locking shaft which are vertically arranged, each locking shaft is located at one end of the corresponding telescopic shaft, the other end of each telescopic shaft is embedded in the partition plate, the door plate and the locking shafts are located on the same side of the through hole, the buffer cavity comprises a gripper and a replacement component, and when the component in the vacuum cavity needs to be replaced, the buffer cavity is in the same vacuum state as the vacuum cavity, and the gripper replaces the component in the vacuum cavity with the replacement component in the buffer cavity. The device andthe method for replacing the component in the vacuum cavity can reduce the downtime and improve the utilization rate of equipment.
本发明公开了一种真空腔中器件的更换装置，包括真空腔和缓冲腔，所述真空腔和缓冲腔之间通过隔板隔开，所述隔板上包括通孔、滑轨、可在滑轨中滑动且能够覆盖通孔的门板、均匀分布在通孔边上的可伸缩的锁扣、以及连接锁扣和门板的控制中心，所述锁扣包括垂直设置的伸缩轴和锁紧轴，所述锁紧轴位于所述伸缩轴的一端，所述伸缩轴的另一端嵌入在所述隔板中，所述门板与所述锁紧轴位于所述通孔的同一侧，所述缓冲腔中包含抓手和替换器件，当真空腔中器件需要被替换时，所述缓冲腔处于与真空腔相同的真空状态，所述抓手用缓冲腔中替换器件替换真空腔中器件。本发明公开了一种真空腔中器件的更换装置和方法，可以减少停机时间，提高设备的利用率。
Device and method for replacing component in vacuum chamber
一种真空腔中器件的更换装置和方法
2020-10-30
Patent
Electronic Resource
Chinese
IPC:
E06B
Feste oder bewegliche Abschlüsse für Öffnungen in Bauwerken, Fahrzeugen, Zäunen oder ähnlichen Einfriedungen allgemein, z.B. Türen, Fenster, Läden, Tore
,
FIXED OR MOVABLE CLOSURES FOR OPENINGS IN BUILDINGS, VEHICLES, FENCES, OR LIKE ENCLOSURES, IN GENERAL, e.g. DOORS, WINDOWS, BLINDS, GATES
/
E05C
Riegel oder Feststellvorrichtungen für Flügel, insbesondere für Türen oder Fenster
,
BOLTS OR FASTENING DEVICES FOR WINGS, SPECIALLY FOR DOORS OR WINDOWS
/
G03F
Fotomechanische Herstellung strukturierter oder gemusterter Oberflächen, z.B. zum Drucken, zum Herstellen von Halbleiterbauelementen
,
PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES
Sleeper replacing device, sleeper replacing vehicle and sleeper replacing method
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