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Large-size neodymium-aluminum-indium-zinc oxide planar target material and preparation method thereof
The invention discloses a preparation method of a large-size neodymium-aluminum-indium-zinc oxide planar target material. The preparation method is characterized by comprising the following steps: S1,mixing neodymium oxide powder, aluminum oxide powder, indium oxide powder and zinc oxide powder, grinding, pulping to obtain mixed slurry, and carrying out spray granulation on the mixed slurry to obtain granulated powder; S2, sequentially carrying out mold pressing and isostatic pressing on the granulated powder obtained in step S1 to obtain a target biscuit; S3, sintering the target biscuit obtained in step S2 to obtain a sintered blank, wherein the sintering comprises three stages of degreasing, sintering and cooling; and S4, machining and bonding the sintered blank obtained in step S3 toobtain the large-size neodymium-aluminum-indium-zinc oxide planar target material. The invention further discloses the large-size neodymium-aluminum-indium-zinc oxide planar target material. The target material biscuit is obtained through the mold pressing and isostatic pressing forming process, the three-stage sintering process of degreasing, sintering and cooling is adopted, the reasonable sintering condition is controlled, the uniformity of the target material is improved, and the yield of the large-size target material is increased.
本发明公开了一种大尺寸钕铝铟锌氧化物平面靶材制备方法，其特征在于，包括如下步骤：S1、将氧化钕、氧化铝、氧化铟和氧化锌粉末混合研磨制浆得到混合浆料，用混合浆料进行喷雾造粒得到造粒粉；S2、将步骤S1所得的造粒粉依次进行模压和等静压成型得到靶材素坯；S3、将步骤S2得到的靶材素坯进行烧结得到烧结坯；其中，烧结包括：脱脂、烧成和降温三个阶段；S4、将步骤S3得到的烧结坯经机械加工和邦定得到大尺寸钕铝铟锌氧化物平面靶材；本发明还公开了一种大尺寸钕铝铟锌氧化物平面靶材。本发明采用模压和等静压成型工艺得到靶材素坯，采用脱脂、烧成和降温三个阶段烧结工艺，控制合理的烧结条件，提高了靶材均匀度，提高了大尺寸靶材的成品率。
Large-size neodymium-aluminum-indium-zinc oxide planar target material and preparation method thereof
The invention discloses a preparation method of a large-size neodymium-aluminum-indium-zinc oxide planar target material. The preparation method is characterized by comprising the following steps: S1,mixing neodymium oxide powder, aluminum oxide powder, indium oxide powder and zinc oxide powder, grinding, pulping to obtain mixed slurry, and carrying out spray granulation on the mixed slurry to obtain granulated powder; S2, sequentially carrying out mold pressing and isostatic pressing on the granulated powder obtained in step S1 to obtain a target biscuit; S3, sintering the target biscuit obtained in step S2 to obtain a sintered blank, wherein the sintering comprises three stages of degreasing, sintering and cooling; and S4, machining and bonding the sintered blank obtained in step S3 toobtain the large-size neodymium-aluminum-indium-zinc oxide planar target material. The invention further discloses the large-size neodymium-aluminum-indium-zinc oxide planar target material. The target material biscuit is obtained through the mold pressing and isostatic pressing forming process, the three-stage sintering process of degreasing, sintering and cooling is adopted, the reasonable sintering condition is controlled, the uniformity of the target material is improved, and the yield of the large-size target material is increased.
本发明公开了一种大尺寸钕铝铟锌氧化物平面靶材制备方法，其特征在于，包括如下步骤：S1、将氧化钕、氧化铝、氧化铟和氧化锌粉末混合研磨制浆得到混合浆料，用混合浆料进行喷雾造粒得到造粒粉；S2、将步骤S1所得的造粒粉依次进行模压和等静压成型得到靶材素坯；S3、将步骤S2得到的靶材素坯进行烧结得到烧结坯；其中，烧结包括：脱脂、烧成和降温三个阶段；S4、将步骤S3得到的烧结坯经机械加工和邦定得到大尺寸钕铝铟锌氧化物平面靶材；本发明还公开了一种大尺寸钕铝铟锌氧化物平面靶材。本发明采用模压和等静压成型工艺得到靶材素坯，采用脱脂、烧成和降温三个阶段烧结工艺，控制合理的烧结条件，提高了靶材均匀度，提高了大尺寸靶材的成品率。
Large-size neodymium-aluminum-indium-zinc oxide planar target material and preparation method thereof
一种大尺寸钕铝铟锌氧化物平面靶材及其制备方法
WEN HONGFU (author) / LI PENG (author)
2020-12-18
Patent
Electronic Resource
Chinese
IPC:
C04B
Kalk
,
LIME
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