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Diamond film cooling fin and preparation method thereof
The invention provides a diamond film cooling fin and a preparation method thereof. The cooling fin comprises a composite substrate material base layer and a diamond film layer connected with the surface of the base layer. Wherein the composite substrate material base layer comprises diamond particles, silicon carbide particles and silicon powder which are uniformly mixed. The substrate material is mainly composed of the silicon powder, the substrate material composed of the silicon carbide particles and the diamond particles is added into the silicon powder, silicon serves as a main material,and the overall heat conduction capacity of the substrate material is improved by adding the silicon carbide particles and the diamond particles; meanwhile, the diamond particles in the substrate material can provide nucleation cores for the nucleation stage of the CVD diamond film, and the nucleation density of the CVD diamond film growing on the surface of the substrate material can be improved.
本发明提供一种金刚石膜散热片及其制备方法，所述散热片包括复合衬底材料基层，以及与所述基层表面连接的金刚石膜层；所述复合衬底材料基层包括均匀混合的金刚石颗粒、碳化硅颗粒及硅粉。本发明衬底材料以硅粉为主，通过在硅粉中添加碳化硅颗粒和金刚石颗粒组成的衬底材料，以硅为主体材料，通过添加碳化硅颗粒和金刚石颗粒来提升衬底材料的整体导热能力；同时，衬底材料中的金刚石颗粒能为CVD金刚石膜形核阶段提供形核核心，有利于提高CVD金刚石膜在衬底材料表面生长时的形核密度。
Diamond film cooling fin and preparation method thereof
The invention provides a diamond film cooling fin and a preparation method thereof. The cooling fin comprises a composite substrate material base layer and a diamond film layer connected with the surface of the base layer. Wherein the composite substrate material base layer comprises diamond particles, silicon carbide particles and silicon powder which are uniformly mixed. The substrate material is mainly composed of the silicon powder, the substrate material composed of the silicon carbide particles and the diamond particles is added into the silicon powder, silicon serves as a main material,and the overall heat conduction capacity of the substrate material is improved by adding the silicon carbide particles and the diamond particles; meanwhile, the diamond particles in the substrate material can provide nucleation cores for the nucleation stage of the CVD diamond film, and the nucleation density of the CVD diamond film growing on the surface of the substrate material can be improved.
本发明提供一种金刚石膜散热片及其制备方法，所述散热片包括复合衬底材料基层，以及与所述基层表面连接的金刚石膜层；所述复合衬底材料基层包括均匀混合的金刚石颗粒、碳化硅颗粒及硅粉。本发明衬底材料以硅粉为主，通过在硅粉中添加碳化硅颗粒和金刚石颗粒组成的衬底材料，以硅为主体材料，通过添加碳化硅颗粒和金刚石颗粒来提升衬底材料的整体导热能力；同时，衬底材料中的金刚石颗粒能为CVD金刚石膜形核阶段提供形核核心，有利于提高CVD金刚石膜在衬底材料表面生长时的形核密度。
Diamond film cooling fin and preparation method thereof
一种金刚石膜散热片及其制备方法
WU YUQIONG (author) / JIN MEI (author) / ZOU LINLING (author) / AN LIANG (author) / TANG XIAOLIN (author)
2020-12-29
Patent
Electronic Resource
Chinese
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