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Textured piezoelectric ceramic laminated driver and preparation method thereof
The invention provides a textured piezoelectric ceramic laminated driver and a preparation method thereof, and the method comprises the following steps: 1, preparing a ceramic thick film through a fine-grain piezoelectric ceramic substrate and a sheet-shaped template, cutting the obtained ceramic thick film into a square sheet structure with a preset size, and brushing an electrode on one surface of the ceramic thick film with the square sheet structure, to obtain ceramic thick films brushed with inner electrodes; 2, stacking the obtained ceramic thick films brushed with the inner electrodes according to an electrode staggering mode to obtain a ceramic piezoelectric stack; 4, carrying out glue discharging and sintering on the obtained ceramic piezoelectric stack in sequence to obtain a sintered ceramic piezoelectric stack; and 5, performing electrode receiving and polarization on the two side surfaces of the obtained sintered ceramic piezoelectric stack in sequence to obtain the textured lead-based piezoelectric laminated driver. The anisotropic ceramic is obtained through directional growth of the fine-grain piezoelectric ceramic matrix around the flaky template, so that the piezoelectric property of the ceramic is greatly improved.
本发明提供的一种织构化压电陶瓷叠层驱动器及其制备方法，包括以下步骤：步骤1，通过细晶压电陶瓷基体和片状模板制备得到陶瓷厚膜，将得到的陶瓷厚膜切成预设尺寸的方片结构，然后在方片结构的陶瓷厚膜的一表面刷上电极，得到刷有内电极的陶瓷厚膜；步骤2，将得到的刷有内电极的陶瓷厚膜按照电极交错的方式进行堆叠，得到陶瓷压电堆；步骤4，对得到的陶瓷压电堆依次进行排胶和烧结，得到烧结后的陶瓷压电堆；步骤5，在得到的烧结后的陶瓷压电堆的两侧面依次进行被电极、极化，得到织构化铅基压电叠层驱动器；本发明通过细晶压电陶瓷基体围绕片状模板定向生长获得各向异性的陶瓷，从而大幅提高陶瓷的压电性能。
Textured piezoelectric ceramic laminated driver and preparation method thereof
The invention provides a textured piezoelectric ceramic laminated driver and a preparation method thereof, and the method comprises the following steps: 1, preparing a ceramic thick film through a fine-grain piezoelectric ceramic substrate and a sheet-shaped template, cutting the obtained ceramic thick film into a square sheet structure with a preset size, and brushing an electrode on one surface of the ceramic thick film with the square sheet structure, to obtain ceramic thick films brushed with inner electrodes; 2, stacking the obtained ceramic thick films brushed with the inner electrodes according to an electrode staggering mode to obtain a ceramic piezoelectric stack; 4, carrying out glue discharging and sintering on the obtained ceramic piezoelectric stack in sequence to obtain a sintered ceramic piezoelectric stack; and 5, performing electrode receiving and polarization on the two side surfaces of the obtained sintered ceramic piezoelectric stack in sequence to obtain the textured lead-based piezoelectric laminated driver. The anisotropic ceramic is obtained through directional growth of the fine-grain piezoelectric ceramic matrix around the flaky template, so that the piezoelectric property of the ceramic is greatly improved.
本发明提供的一种织构化压电陶瓷叠层驱动器及其制备方法，包括以下步骤：步骤1，通过细晶压电陶瓷基体和片状模板制备得到陶瓷厚膜，将得到的陶瓷厚膜切成预设尺寸的方片结构，然后在方片结构的陶瓷厚膜的一表面刷上电极，得到刷有内电极的陶瓷厚膜；步骤2，将得到的刷有内电极的陶瓷厚膜按照电极交错的方式进行堆叠，得到陶瓷压电堆；步骤4，对得到的陶瓷压电堆依次进行排胶和烧结，得到烧结后的陶瓷压电堆；步骤5，在得到的烧结后的陶瓷压电堆的两侧面依次进行被电极、极化，得到织构化铅基压电叠层驱动器；本发明通过细晶压电陶瓷基体围绕片状模板定向生长获得各向异性的陶瓷，从而大幅提高陶瓷的压电性能。
Textured piezoelectric ceramic laminated driver and preparation method thereof
一种织构化压电陶瓷叠层驱动器及其制备方法
LI FEI (author) / LIU JINFENG (author) / YANG SHUAI (author) / WANG MINGWEN (author) / QIAO LIAO (author) / QIU CHAORUI (author) / GAO XIANGYU (author) / LI JINGLEI (author) / XU ZHUO (author)
2021-05-04
Patent
Electronic Resource
Chinese
IPC:
C04B
Kalk
,
LIME
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