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Preparation method of cadmium stannate target material
The invention discloses a preparation method of a cadmium stannate target material. The preparation method comprises the following steps: (1) uniformly mixing cadmium oxide, tin dioxide and cadmium stannate powder according to a molar ratio of 2:1:(1-2); (2) putting the mixed materials into a mold, and putting the mold into a vacuum hot pressing furnace; (3) vacuumizing, raising the temperature to 500-700 DEG C, keeping the temperature for T1=20-60 minutes, then pressurizing, keeping the temperature for T2=20-40 minutes under the pressure of 10-40 MPa, and keeping the total heat preservation time T3=50-80 minutes, wherein T1 is lower than T3; and (4) cooling, depressurizing and demolding to obtain the cadmium stannate target material. According to the preparation method, the raw materials of cadmium oxide and stannic oxide are directly subjected to vacuum hot pressed sintering, the sintering temperature of the target material is reduced, the adverse phenomena of material spraying, mold damage and the like caused by too fast reaction of cadmium oxide and stannic oxide can be avoided by adding the cadmium stannate powder, and the relative density of the prepared target material is larger than 96%.
本发明公开了一种锡酸镉靶材的制备方法，包括以下步骤：(1)将氧化镉、二氧化锡和锡酸镉粉末混合均匀，所述氧化镉、二氧化锡和锡酸镉的摩尔比为：2：1：1～2；(2)将混合好的物料装入模具中，放入真空热压炉中；(3)抽真空，升温至500～700℃，保温T1＝20～60min后加压，在10～40MPa下保持T2＝20～40min，保温总时长T3＝50～80min，T1＜T3；(4)降温、降压、脱模，即得所述锡酸镉靶材。本发明所述制备方法用氧化镉、二氧化锡原料直接真空热压烧结，降低了靶材烧结的温度，锡酸镉粉末的加入可以避免氧化镉和二氧化锡的反应过快，导致喷料、损坏模具等不良现象的发生，制得的靶材相对密度＞96％。
Preparation method of cadmium stannate target material
The invention discloses a preparation method of a cadmium stannate target material. The preparation method comprises the following steps: (1) uniformly mixing cadmium oxide, tin dioxide and cadmium stannate powder according to a molar ratio of 2:1:(1-2); (2) putting the mixed materials into a mold, and putting the mold into a vacuum hot pressing furnace; (3) vacuumizing, raising the temperature to 500-700 DEG C, keeping the temperature for T1=20-60 minutes, then pressurizing, keeping the temperature for T2=20-40 minutes under the pressure of 10-40 MPa, and keeping the total heat preservation time T3=50-80 minutes, wherein T1 is lower than T3; and (4) cooling, depressurizing and demolding to obtain the cadmium stannate target material. According to the preparation method, the raw materials of cadmium oxide and stannic oxide are directly subjected to vacuum hot pressed sintering, the sintering temperature of the target material is reduced, the adverse phenomena of material spraying, mold damage and the like caused by too fast reaction of cadmium oxide and stannic oxide can be avoided by adding the cadmium stannate powder, and the relative density of the prepared target material is larger than 96%.
本发明公开了一种锡酸镉靶材的制备方法，包括以下步骤：(1)将氧化镉、二氧化锡和锡酸镉粉末混合均匀，所述氧化镉、二氧化锡和锡酸镉的摩尔比为：2：1：1～2；(2)将混合好的物料装入模具中，放入真空热压炉中；(3)抽真空，升温至500～700℃，保温T1＝20～60min后加压，在10～40MPa下保持T2＝20～40min，保温总时长T3＝50～80min，T1＜T3；(4)降温、降压、脱模，即得所述锡酸镉靶材。本发明所述制备方法用氧化镉、二氧化锡原料直接真空热压烧结，降低了靶材烧结的温度，锡酸镉粉末的加入可以避免氧化镉和二氧化锡的反应过快，导致喷料、损坏模具等不良现象的发生，制得的靶材相对密度＞96％。
Preparation method of cadmium stannate target material
一种锡酸镉靶材的制备方法
WEN CHONGBIN (author) / YU FANG (author) / ZHU LIU (author) / TONG PEIYUN (author)
2021-08-06
Patent
Electronic Resource
Chinese
IPC:
C04B
Kalk
,
LIME
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