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Preparation method of aluminum nitride aluminum-coated ceramic lining plate
The invention relates to the technical field of semiconductors. A preparation method of an aluminum nitride aluminum-coated ceramic lining plate comprises the following steps: step 1, preparing an aluminum nitride ceramic surface modification layer: preparing a surface modification solution, immersing aluminum nitride ceramic into the surface modification solution, fully wetting and then drying; step 2, curing the surface modification layer: baking the aluminum nitride ceramic in a muffle furnace to form a uniform curing modification layer on the surface of the aluminum nitride ceramic; and step 3, brazing welding: preparing aluminum alloy metal slurry, coating the slurry on the aluminum nitride ceramic with the cured modified layer, drying, and then brazing the aluminum nitride ceramic with high-purity aluminum foil to prepare the aluminum nitride aluminum-coated ceramic lining plate. The problem that low-temperature aluminum brazing and aluminum nitride ceramic are poor in wetting is solved, brazing sintering forming is adopted, the component purity of the high-purity aluminum surface is kept, the manufacturing cost can be greatly reduced, the yield is high, operation and forming are easy, and batch production can be achieved.
本发明涉及半导体技术领域。一种氮化铝覆铝陶瓷衬板的制备方法，包括以下步骤：步骤一：氮化铝陶瓷表面改性层制备，制备表面改性溶液，将氮化铝陶瓷浸入到表面改性溶液中，充分润湿后烘干；步骤二：表面改性层固化，将氮化铝陶瓷置于马弗炉中烘烤，在氮化铝陶瓷表面形成均匀的固化改性层；步骤三：钎焊焊接，铝合金金属浆料制备，将浆料涂覆在具有固化改性层的氮化铝陶瓷上，烘干，再与高纯铝箔进行钎焊焊接，制备氮化铝覆铝陶瓷衬板。本发明克服了低温铝钎焊与氮化铝陶瓷润湿不良的难题，采用钎焊烧结成型，保持高纯铝面成分纯度，可以大大降低制造成本，且良率高，易于操作，易于成型，可批量生产。
Preparation method of aluminum nitride aluminum-coated ceramic lining plate
The invention relates to the technical field of semiconductors. A preparation method of an aluminum nitride aluminum-coated ceramic lining plate comprises the following steps: step 1, preparing an aluminum nitride ceramic surface modification layer: preparing a surface modification solution, immersing aluminum nitride ceramic into the surface modification solution, fully wetting and then drying; step 2, curing the surface modification layer: baking the aluminum nitride ceramic in a muffle furnace to form a uniform curing modification layer on the surface of the aluminum nitride ceramic; and step 3, brazing welding: preparing aluminum alloy metal slurry, coating the slurry on the aluminum nitride ceramic with the cured modified layer, drying, and then brazing the aluminum nitride ceramic with high-purity aluminum foil to prepare the aluminum nitride aluminum-coated ceramic lining plate. The problem that low-temperature aluminum brazing and aluminum nitride ceramic are poor in wetting is solved, brazing sintering forming is adopted, the component purity of the high-purity aluminum surface is kept, the manufacturing cost can be greatly reduced, the yield is high, operation and forming are easy, and batch production can be achieved.
本发明涉及半导体技术领域。一种氮化铝覆铝陶瓷衬板的制备方法，包括以下步骤：步骤一：氮化铝陶瓷表面改性层制备，制备表面改性溶液，将氮化铝陶瓷浸入到表面改性溶液中，充分润湿后烘干；步骤二：表面改性层固化，将氮化铝陶瓷置于马弗炉中烘烤，在氮化铝陶瓷表面形成均匀的固化改性层；步骤三：钎焊焊接，铝合金金属浆料制备，将浆料涂覆在具有固化改性层的氮化铝陶瓷上，烘干，再与高纯铝箔进行钎焊焊接，制备氮化铝覆铝陶瓷衬板。本发明克服了低温铝钎焊与氮化铝陶瓷润湿不良的难题，采用钎焊烧结成型，保持高纯铝面成分纯度，可以大大降低制造成本，且良率高，易于操作，易于成型，可批量生产。
Preparation method of aluminum nitride aluminum-coated ceramic lining plate
一种氮化铝覆铝陶瓷衬板的制备方法
OUYANG PENG (author) / HE XIANHAN (author) / GE ZHUANG (author) / WANG BIN (author) / ZHANG JIN (author) / ZHANG ENRONG (author)
2021-08-06
Patent
Electronic Resource
Chinese
IPC:
C04B
Kalk
,
LIME
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