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SILICON NITRIDE POWDER AND METHOD FOR PRODUCING SAME, AND METHOD FOR PRODUCING SILICON NITRIDE SINTERED BODY
Provided is a silicon nitride powder having a total amount of fluorine of 100-1000 mass ppm and a total amount of Fe, Al, and Ca of 100-1000 mass ppm. Provided is a method for producing silicon nitride powder that has a step for sintering a raw material including silicon powder and a fluoride with a content of fluoride to silicon powder of 0.1-2 mass% in a mixed atmosphere including at least one selected from the group consisting of nitrogen, hydrogen, and ammonia to obtain a sintered product, and a step for treating the sintered product by hydrofluoric acid having a hydrogen fluoride concentration of 10-40 mass%.
提供总氟量为100～1000质量ppm且Fe、Al及Ca的合计量为100～1000质量ppm的氮化硅粉末。提供氮化硅粉末的制造方法，其具有下述工序：将包含硅粉末和氟化物且相对于硅粉末而言的氟化物的含量为0.1～2质量％的原料在包含氮与选自由氢及氨组成的组中的至少一者的混合气氛下进行烧成而制得烧成物的工序；和使用氟化氢浓度为10～40质量％的氢氟酸对烧成物进行处理的工序。
SILICON NITRIDE POWDER AND METHOD FOR PRODUCING SAME, AND METHOD FOR PRODUCING SILICON NITRIDE SINTERED BODY
Provided is a silicon nitride powder having a total amount of fluorine of 100-1000 mass ppm and a total amount of Fe, Al, and Ca of 100-1000 mass ppm. Provided is a method for producing silicon nitride powder that has a step for sintering a raw material including silicon powder and a fluoride with a content of fluoride to silicon powder of 0.1-2 mass% in a mixed atmosphere including at least one selected from the group consisting of nitrogen, hydrogen, and ammonia to obtain a sintered product, and a step for treating the sintered product by hydrofluoric acid having a hydrogen fluoride concentration of 10-40 mass%.
提供总氟量为100～1000质量ppm且Fe、Al及Ca的合计量为100～1000质量ppm的氮化硅粉末。提供氮化硅粉末的制造方法，其具有下述工序：将包含硅粉末和氟化物且相对于硅粉末而言的氟化物的含量为0.1～2质量％的原料在包含氮与选自由氢及氨组成的组中的至少一者的混合气氛下进行烧成而制得烧成物的工序；和使用氟化氢浓度为10～40质量％的氢氟酸对烧成物进行处理的工序。
SILICON NITRIDE POWDER AND METHOD FOR PRODUCING SAME, AND METHOD FOR PRODUCING SILICON NITRIDE SINTERED BODY
氮化硅粉末及其制造方法、以及氮化硅烧结体的制造方法
MIYASHITA TOSHIYUKI (author) / NAKAMURA YUZO (author)
2021-11-05
Patent
Electronic Resource
Chinese
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