A platform for research: civil engineering, architecture and urbanism
A platform for research: civil engineering, architecture and urbanism
SILICON NITRIDE SUBSTRATE, SILICON NITRIDE-METAL COMPLEX, SILICON NITRIDE CIRCUIT BOARD, AND SEMICONDUCTOR PACKAGE
Provided is a silicon nitride substrate which comprises silicon nitride and magnesium, wherein when the surface of the silicon nitride substrate is analyzed with an X-ray fluorescence analyzer under a specific condition I, XB/XA is 0.8 to 1.0.
本发明提供氮化硅基板，其为含有氮化硅和镁的氮化硅基板，在特定的条件I下，利用X射线荧光分析装置对氮化硅基板的表面进行分析时，XB/XA为0.8以上、1.0以下。
SILICON NITRIDE SUBSTRATE, SILICON NITRIDE-METAL COMPLEX, SILICON NITRIDE CIRCUIT BOARD, AND SEMICONDUCTOR PACKAGE
Provided is a silicon nitride substrate which comprises silicon nitride and magnesium, wherein when the surface of the silicon nitride substrate is analyzed with an X-ray fluorescence analyzer under a specific condition I, XB/XA is 0.8 to 1.0.
本发明提供氮化硅基板，其为含有氮化硅和镁的氮化硅基板，在特定的条件I下，利用X射线荧光分析装置对氮化硅基板的表面进行分析时，XB/XA为0.8以上、1.0以下。
SILICON NITRIDE SUBSTRATE, SILICON NITRIDE-METAL COMPLEX, SILICON NITRIDE CIRCUIT BOARD, AND SEMICONDUCTOR PACKAGE
氮化硅基板、氮化硅-金属复合体、氮化硅电路基板及半导体封装件
TSUGAWA YUTA (author) / KOBASHI SEIJI (author) / NISHIMURA KOJI (author)
2021-11-09
Patent
Electronic Resource
Chinese
| European Patent Office | 2024
| European Patent Office | 2020
| European Patent Office | 2022
| European Patent Office | 2024
SILICON NITRIDE SUBSTRATE AND SILICON NITRIDE CIRCUIT BOARD
| European Patent Office | 2020