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Quartz fiber/carbon fiber reinforced carbon-based composite material insulation barrel and preparation method thereof
The invention provides a quartz fiber/carbon fiber reinforced carbon-based composite material insulation barrel and a preparation method thereof, and belongs to the technical field of monocrystalline silicon furnaces and carbon-based composite material preparation. The heat preservation barrel is prepared from a heat preservation barrel prefabricated part through curing shaping, chemical vapor deposition densification and high-temperature graphitization; wherein the middle layer of the heat preservation barrel prefabricated part is made of carbon fibers, the inner surface layer and the outer surface layer are made of quartz fibers, and the heat preservation barrel prefabricated part is formed by alternately laminating and needling carbon fiber plain cloth or twill cloth or non-woven cloth and short carbon fiber webs or alternately laminating and needling quartz fiber non-woven cloth and short quartz fiber webs. The obtained quartz fiber/carbon fiber reinforced carbon-based composite material insulation barrel is high in strength; the inner and outer surfaces are composed of quartz fibers, silicon carbide interface layers and matrix carbon, so that the reaction between the inner and outer surface layers of the insulation barrel and silicon steam can be effectively reduced or avoided, the service life of the insulation barrel can be prolonged by more than 30%, and the insulation barrel is suitable for batch production of high-efficiency single crystal furnace insulation barrels.
本发明提供了一种石英纤维/炭纤维增强炭基复合材料保温桶及其制备方法，属于单晶硅炉及炭基复合材料制备技术领域。该保温桶由保温桶预制件经固化定型、化学气相沉积增密、高温石墨化制备而成。保温桶预制件的中间层为炭纤维，内外表面层为石英纤维组成，分别采用炭纤维平纹布或斜纹布或无纬布加短炭纤维网胎交替叠层针刺或石英纤维无纬布+短石英纤维网胎交替叠层针刺而成。所得石英纤维/炭纤维增强炭基复合材料保温桶强度高，内外表面由石英纤维+碳化硅界面层+基体炭组成，可以有效降低或避免保温桶内外表面层与硅蒸气反应，能提高保温桶的使用寿命30％以上，适合高效单晶炉保温桶的批量生产。
Quartz fiber/carbon fiber reinforced carbon-based composite material insulation barrel and preparation method thereof
The invention provides a quartz fiber/carbon fiber reinforced carbon-based composite material insulation barrel and a preparation method thereof, and belongs to the technical field of monocrystalline silicon furnaces and carbon-based composite material preparation. The heat preservation barrel is prepared from a heat preservation barrel prefabricated part through curing shaping, chemical vapor deposition densification and high-temperature graphitization; wherein the middle layer of the heat preservation barrel prefabricated part is made of carbon fibers, the inner surface layer and the outer surface layer are made of quartz fibers, and the heat preservation barrel prefabricated part is formed by alternately laminating and needling carbon fiber plain cloth or twill cloth or non-woven cloth and short carbon fiber webs or alternately laminating and needling quartz fiber non-woven cloth and short quartz fiber webs. The obtained quartz fiber/carbon fiber reinforced carbon-based composite material insulation barrel is high in strength; the inner and outer surfaces are composed of quartz fibers, silicon carbide interface layers and matrix carbon, so that the reaction between the inner and outer surface layers of the insulation barrel and silicon steam can be effectively reduced or avoided, the service life of the insulation barrel can be prolonged by more than 30%, and the insulation barrel is suitable for batch production of high-efficiency single crystal furnace insulation barrels.
本发明提供了一种石英纤维/炭纤维增强炭基复合材料保温桶及其制备方法，属于单晶硅炉及炭基复合材料制备技术领域。该保温桶由保温桶预制件经固化定型、化学气相沉积增密、高温石墨化制备而成。保温桶预制件的中间层为炭纤维，内外表面层为石英纤维组成，分别采用炭纤维平纹布或斜纹布或无纬布加短炭纤维网胎交替叠层针刺或石英纤维无纬布+短石英纤维网胎交替叠层针刺而成。所得石英纤维/炭纤维增强炭基复合材料保温桶强度高，内外表面由石英纤维+碳化硅界面层+基体炭组成，可以有效降低或避免保温桶内外表面层与硅蒸气反应，能提高保温桶的使用寿命30％以上，适合高效单晶炉保温桶的批量生产。
Quartz fiber/carbon fiber reinforced carbon-based composite material insulation barrel and preparation method thereof
一种石英纤维/炭纤维增强炭基复合材料保温桶及其制备方法
CHEN TENGFEI (author)
2022-02-08
Patent
Electronic Resource
Chinese
IPC:
C04B
Kalk
,
LIME
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