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Indium titanium yttrium oxide powder and preparation method thereof
The invention discloses indium titanium yttrium oxide powder and a preparation method thereof, belonging to the field of preparation of indium titanium yttrium oxide. The chemical formula of the indium titanium yttrium oxide powder is In<1-x-y>TiYO<1.5+0.5>x, wherein x is equal to 0.001 to 0.2, and y is equal to 0.001 to 0.2. According to the preparation method of the indium titanium yttrium oxide powder, the problem that components are not uniform due to addition of large-particle rare earth metal is solved, the indium titanium yttrium oxide powder with uniform particle size distribution and uniform components is finally obtained, and the indium titanium yttrium oxide powder can be used for preparing an indium titanium yttrium oxide target material with high density, uniform structure and excellent photoelectric specificity.
本发明公开了一种氧化铟钛钇粉体及其制备方法，属于铟钛钇氧化物的制备领域。所述氧化铟钛钇粉体的化学式为In1‑x‑yTixYyO1.5+0.5x，其中，x＝0.001‑0.2、y＝0.001‑0.2。本发明氧化铟钛钇粉体的制备方法克服了加入大颗粒稀土金属导致的成分不均一的问题，最终获得粒径分布均匀缺成分均一的氧化铟钛钇粉体，该氧化铟钛钇粉体可以用于制备高密度、组织均匀及光电特异性优异的氧化铟钛钇靶材。
Indium titanium yttrium oxide powder and preparation method thereof
The invention discloses indium titanium yttrium oxide powder and a preparation method thereof, belonging to the field of preparation of indium titanium yttrium oxide. The chemical formula of the indium titanium yttrium oxide powder is In<1-x-y>TiYO<1.5+0.5>x, wherein x is equal to 0.001 to 0.2, and y is equal to 0.001 to 0.2. According to the preparation method of the indium titanium yttrium oxide powder, the problem that components are not uniform due to addition of large-particle rare earth metal is solved, the indium titanium yttrium oxide powder with uniform particle size distribution and uniform components is finally obtained, and the indium titanium yttrium oxide powder can be used for preparing an indium titanium yttrium oxide target material with high density, uniform structure and excellent photoelectric specificity.
本发明公开了一种氧化铟钛钇粉体及其制备方法，属于铟钛钇氧化物的制备领域。所述氧化铟钛钇粉体的化学式为In1‑x‑yTixYyO1.5+0.5x，其中，x＝0.001‑0.2、y＝0.001‑0.2。本发明氧化铟钛钇粉体的制备方法克服了加入大颗粒稀土金属导致的成分不均一的问题，最终获得粒径分布均匀缺成分均一的氧化铟钛钇粉体，该氧化铟钛钇粉体可以用于制备高密度、组织均匀及光电特异性优异的氧化铟钛钇靶材。
Indium titanium yttrium oxide powder and preparation method thereof
一种氧化铟钛钇粉体及其制备方法
WANG QIFENG (author) / SHAO XUELIANG (author) / LI KAIJIE (author) / ZHANG LAIWEN (author)
2022-02-11
Patent
Electronic Resource
Chinese
IPC:
C04B
Kalk
,
LIME
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