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    Method for producing scandium-aluminum nitride target for PLD

    The invention relates to a method for producing a scandium aluminum nitride (ScAlN) target for pulsed laser deposition (PLD), the method comprising the steps of:-providing a scandium aluminum alloy body; -comminuting the scandium-aluminum alloy body into scandium-aluminum particles; nitriding the scandium aluminum particles into scandium aluminum nitride particles; and hot-pressing the aluminum scandium nitride particles into the aluminum scandium nitride target.

    本发明涉及生产用于脉冲激光沉积(PLD)的氮化钪铝(ScAlN)靶体的方法，该方法包括以下步骤：‑提供钪铝合金体；‑将钪铝合金体粉碎为钪铝颗粒；‑将钪铝颗粒氮化成氮化钪铝颗粒；‑将氮化钪铝颗粒热压成氮化钪铝靶体。

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    Method for producing scandium-aluminum nitride target for PLD

    The invention relates to a method for producing a scandium aluminum nitride (ScAlN) target for pulsed laser deposition (PLD), the method comprising the steps of:-providing a scandium aluminum alloy body; -comminuting the scandium-aluminum alloy body into scandium-aluminum particles; nitriding the scandium aluminum particles into scandium aluminum nitride particles; and hot-pressing the aluminum scandium nitride particles into the aluminum scandium nitride target.

    本发明涉及生产用于脉冲激光沉积(PLD)的氮化钪铝(ScAlN)靶体的方法，该方法包括以下步骤：‑提供钪铝合金体；‑将钪铝合金体粉碎为钪铝颗粒；‑将钪铝颗粒氮化成氮化钪铝颗粒；‑将氮化钪铝颗粒热压成氮化钪铝靶体。

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    Method for producing scandium-aluminum nitride target for PLD

    The invention relates to a method for producing a scandium aluminum nitride (ScAlN) target for pulsed laser deposition (PLD), the method comprising the steps of:-providing a scandium aluminum alloy body; -comminuting the scandium-aluminum alloy body into scandium-aluminum particles; nitriding the scandium aluminum particles into scandium aluminum nitride particles; and hot-pressing the aluminum scandium nitride particles into the aluminum scandium nitride target.

    本发明涉及生产用于脉冲激光沉积(PLD)的氮化钪铝(ScAlN)靶体的方法，该方法包括以下步骤：‑提供钪铝合金体；‑将钪铝合金体粉碎为钪铝颗粒；‑将钪铝颗粒氮化成氮化钪铝颗粒；‑将氮化钪铝颗粒热压成氮化钪铝靶体。

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    Title:

    Method for producing scandium-aluminum nitride target for PLD

    Additional title:

    生产用于PLD的氮化钪铝靶的方法

    Contributors:

    HOPMAN WILHELMUS CORNELIS LAMBERTUS (author) / DEKKERS JAN MATTHIJN (author)

    Publication date:

    2022-03-04

    Type of media:

    Patent

    Type of material:

    Electronic Resource

    Language:

    Chinese

    Classification:

    IPC:  C04B Kalk , LIME / B22F Verarbeiten von Metallpulver , WORKING METALLIC POWDER / C23C Beschichten metallischer Werkstoffe , COATING METALLIC MATERIAL

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