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METHOD FOR PRODUCING A SCANDIUM ALUMINUM NITRIDE TARGET FOR PLD
The invention relates to a method for producing a scandium aluminum nitride (ScAlN) target body for pulsed laser deposition (PLD), which method comprises the steps of:- providing a scandium aluminum alloy body;- pulverizing the scandium aluminum alloy body into scandium aluminum particles;- nitridizing the scandium aluminum particles into scandium aluminium nitride particles;- hot pressing the scandium aluminum nitride particles into a scandium aluminum nitride target body.
METHOD FOR PRODUCING A SCANDIUM ALUMINUM NITRIDE TARGET FOR PLD
The invention relates to a method for producing a scandium aluminum nitride (ScAlN) target body for pulsed laser deposition (PLD), which method comprises the steps of:- providing a scandium aluminum alloy body;- pulverizing the scandium aluminum alloy body into scandium aluminum particles;- nitridizing the scandium aluminum particles into scandium aluminium nitride particles;- hot pressing the scandium aluminum nitride particles into a scandium aluminum nitride target body.
METHOD FOR PRODUCING A SCANDIUM ALUMINUM NITRIDE TARGET FOR PLD
VERFAHREN ZUR HERSTELLUNG EINES SCANDIUM-ALUMINIUMNITRIDTARGETS FÜR PLD
PROCÉDÉ DE PRODUCTION D'UNE CIBLE EN NITRURE DE SCANDIUM ET D'ALUMINIUM POUR PLD
HOPMAN WILLEM CORNELIS LAMBERT (author) / DEKKERS JAN MATTHIJN (author)
2023-07-26
Patent
Electronic Resource
English
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