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The invention discloses a thermal evaporation coating ceramic target material and a preparation method thereof, the ceramic target material comprises a structural material which forms a heterostructure with raw material powder, the structural material is ceramic fibers and/or ceramic chips with the same chemical components as the raw material powder, the length of the ceramic fibers is 5-100 [mu] m, and the diameter of the ceramic fibers is 0.2-6 [mu] m; the thickness of the ceramic chip is 2-10 [mu] m, and the width of the ceramic chip is 20-60 [mu] m; the proportion of the structural material in the ceramic target material is 10-35 wt%. According to the preparation method, the ceramic fibers, the ceramic chips or the combination of the ceramic fibers and the ceramic chips which are made of the same material are added into the target raw materials, so that the ceramic target blank forms a heterostructure after being sintered, and the problem that cracking is easily caused by overlarge thermal shock stress during thermal evaporation of the ceramic target is solved on the premise that the coating quality is not influenced.
本发明公开了一种热蒸发镀膜陶瓷靶材及制备方法，所述陶瓷靶材包括与原料粉体共同构成异质结构的结构材料，所述结构材料为与原料粉体相同化学组份的陶瓷纤维和/或陶瓷片，所述陶瓷纤维的长度为5‑100μm，直径为0.2‑6μm；所述陶瓷片的厚度为2‑10μm、宽度为20‑60μm；结构材料在陶瓷靶材中的占比为10‑35wt%。本发明通过在靶材原料中添加同种材质的陶瓷纤维、陶瓷片或者两者组合，使陶瓷靶材坯体在烧结后形成一种异质结构，在不影响镀膜质量的前提下，解决陶瓷靶材热蒸发时热冲击应力过大易造成开裂的问题。
The invention discloses a thermal evaporation coating ceramic target material and a preparation method thereof, the ceramic target material comprises a structural material which forms a heterostructure with raw material powder, the structural material is ceramic fibers and/or ceramic chips with the same chemical components as the raw material powder, the length of the ceramic fibers is 5-100 [mu] m, and the diameter of the ceramic fibers is 0.2-6 [mu] m; the thickness of the ceramic chip is 2-10 [mu] m, and the width of the ceramic chip is 20-60 [mu] m; the proportion of the structural material in the ceramic target material is 10-35 wt%. According to the preparation method, the ceramic fibers, the ceramic chips or the combination of the ceramic fibers and the ceramic chips which are made of the same material are added into the target raw materials, so that the ceramic target blank forms a heterostructure after being sintered, and the problem that cracking is easily caused by overlarge thermal shock stress during thermal evaporation of the ceramic target is solved on the premise that the coating quality is not influenced.
本发明公开了一种热蒸发镀膜陶瓷靶材及制备方法，所述陶瓷靶材包括与原料粉体共同构成异质结构的结构材料，所述结构材料为与原料粉体相同化学组份的陶瓷纤维和/或陶瓷片，所述陶瓷纤维的长度为5‑100μm，直径为0.2‑6μm；所述陶瓷片的厚度为2‑10μm、宽度为20‑60μm；结构材料在陶瓷靶材中的占比为10‑35wt%。本发明通过在靶材原料中添加同种材质的陶瓷纤维、陶瓷片或者两者组合，使陶瓷靶材坯体在烧结后形成一种异质结构，在不影响镀膜质量的前提下，解决陶瓷靶材热蒸发时热冲击应力过大易造成开裂的问题。
Thermal evaporation coating ceramic target material and preparation method thereof
一种热蒸发镀膜陶瓷靶材及制备方法
2022-05-31
Patent
Electronic Resource
Chinese
IPC:
C04B
Kalk
,
LIME
/
C23C
Beschichten metallischer Werkstoffe
,
COATING METALLIC MATERIAL
/
D01F
Chemische Gesichtspunkte bei der Herstellung von produzierten Filamenten, Zwirnen, Fasern, Borsten oder Bändern
,
CHEMICAL FEATURES IN THE MANUFACTURE OF MAN-MADE FILAMENTS, THREADS, FIBRES, BRISTLES OR RIBBONS
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