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A platform for research: civil engineering, architecture and urbanism
Method for recycling IGZO waste target
The invention discloses a method for recycling an IGZO waste target. The method comprises the following steps: (1) cleaning the waste target; (2) crushing the waste target; (3) gasifying the waste target by using plasma: putting the crucible filled with the waste target into a plasma reaction chamber, and putting the crucible below a plasma gun; introducing clean air into the reaction chamber for gas protection; the inert gas is ionized to generate plasma, so that the waste target is gasified to form IGZO steam; (4) condensing the powder steam: guiding the IGZO steam into a cooling chamber, and condensing the IGZO steam into IGZO powder; and (5) powder recovery: collecting the powder. According to the method, the IGZO nano powder is efficiently recycled by using a plasma high-temperature evaporation method, the problem of waste of the IGZO waste target is solved, and meanwhile, the method is simple in process, high in recovery rate and free of pollution to the environment.
本发明公开了一种IGZO废靶回收再利用的方法，包括以下步骤：（1）废靶清洗：（2）废靶破碎；（3）等离子体气化废靶：将装有废靶的坩埚放入等离子体反应室，放在等离子枪下方；反应室通入洁净空气进行气体保护；电离惰性气体产生等离子体使废靶气化形成IGZO蒸汽；（4）粉末蒸汽凝结：将IGZO蒸汽导向冷却室凝结成IGZO粉体；（5）粉末回收：对粉体进行收集。本发明使用等离子高温蒸发法高效回收再利用了IGZO纳米粉体，解决了IGZO废靶浪费的问题，同时该方法工艺简单、回收率高、对环境不产生污染。
Method for recycling IGZO waste target
The invention discloses a method for recycling an IGZO waste target. The method comprises the following steps: (1) cleaning the waste target; (2) crushing the waste target; (3) gasifying the waste target by using plasma: putting the crucible filled with the waste target into a plasma reaction chamber, and putting the crucible below a plasma gun; introducing clean air into the reaction chamber for gas protection; the inert gas is ionized to generate plasma, so that the waste target is gasified to form IGZO steam; (4) condensing the powder steam: guiding the IGZO steam into a cooling chamber, and condensing the IGZO steam into IGZO powder; and (5) powder recovery: collecting the powder. According to the method, the IGZO nano powder is efficiently recycled by using a plasma high-temperature evaporation method, the problem of waste of the IGZO waste target is solved, and meanwhile, the method is simple in process, high in recovery rate and free of pollution to the environment.
本发明公开了一种IGZO废靶回收再利用的方法，包括以下步骤：（1）废靶清洗：（2）废靶破碎；（3）等离子体气化废靶：将装有废靶的坩埚放入等离子体反应室，放在等离子枪下方；反应室通入洁净空气进行气体保护；电离惰性气体产生等离子体使废靶气化形成IGZO蒸汽；（4）粉末蒸汽凝结：将IGZO蒸汽导向冷却室凝结成IGZO粉体；（5）粉末回收：对粉体进行收集。本发明使用等离子高温蒸发法高效回收再利用了IGZO纳米粉体，解决了IGZO废靶浪费的问题，同时该方法工艺简单、回收率高、对环境不产生污染。
Method for recycling IGZO waste target
一种IGZO废靶回收再利用的方法
ZHANG BING (author) / WANG ZHIQIANG (author) / ZENG DUNFENG (author) / MA JIANBAO (author) / TAO CHENG (author) / XU JUNWEI (author)
2022-07-29
Patent
Electronic Resource
Chinese
Method for preparing IGZO target material by recovering IGZO waste biscuit
| European Patent Office | 2021