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Ceramic plate and method for manufacturing same
One aspect of the present invention provides a ceramic plate containing silicon nitride and YMgSi2O5N, in which the maximum value of the content of YMgSi2O5N is less than 8.0 mass% based on the total amount when the composition of the surface is quantitatively analyzed by X-ray diffraction.
本发明的一个方面提供陶瓷板,其为含有氮化硅及YMgSi2O5N的陶瓷板,通过X射线衍射法对表面的组成进行定量分析时,以总量为基准,上述YMgSi2O5N的含有率的最大值低于8.0质量%。
Ceramic plate and method for manufacturing same
One aspect of the present invention provides a ceramic plate containing silicon nitride and YMgSi2O5N, in which the maximum value of the content of YMgSi2O5N is less than 8.0 mass% based on the total amount when the composition of the surface is quantitatively analyzed by X-ray diffraction.
本发明的一个方面提供陶瓷板,其为含有氮化硅及YMgSi2O5N的陶瓷板,通过X射线衍射法对表面的组成进行定量分析时,以总量为基准,上述YMgSi2O5N的含有率的最大值低于8.0质量%。
Ceramic plate and method for manufacturing same
陶瓷板及其制造方法
YAMAGATA TOSHITAKA (author) / YAMAGUCHI MITSUHIRO (author) / HIGASHI RIKI (author)
2022-08-02
Patent
Electronic Resource
Chinese
IPC:
C04B
Kalk
,
LIME
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