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Method for preparing high-performance aluminum nitride ceramic substrate through double doping of rare earth fluoride and scandium oxide
The invention discloses a method for preparing a high-performance aluminum nitride ceramic substrate through double doping of rare earth fluoride and scandium oxide, and belongs to the technical field of aluminum nitride ceramic preparation. The aluminum nitride ceramic is prepared from the following components in parts by weight through a pressureless sintering method: 90-100 parts of aluminum nitride, 0.01-10 parts of rare earth fluoride and 0.01-10 parts of scandium oxide. According to the invention, the rare earth fluoride and scandium oxide are co-doped as the sintering aid, the addition of the rare earth fluoride can form a liquid phase at a lower temperature to promote the densification of the green body and remove oxygen impurities, and meanwhile, the second phase can be reduced or even removed under the reduction action, so that the grain boundary is further purified, and the heat conductivity is improved. And the scandium oxide is added, so that the bending strength of the product can be improved by refining grains and introducing more transgranular fractures. Compared with vacuum hot pressing sintering, the high-performance aluminum nitride ceramic is prepared by adopting a pressureless sintering method which is more time-saving and labor-saving, and the performance of the high-performance aluminum nitride ceramic is close to that of partial hot pressing sintering aluminum nitride ceramic.
本发明公开了一种稀土氟化物与氧化钪双掺制备高性能氮化铝陶瓷基板的方法，属于氮化铝陶瓷制备技术领域。其由以下重量份组分用无压烧结法制备得到：氮化铝90‑100份，稀土氟化物0.01‑10份，氧化钪0.01‑10份。本发明以稀土氟化物与氧化钪双掺作为烧结助剂，稀土氟化物的加入能够在较低温度形成液相，促进坯体致密化并去除氧杂质，同时其第二相在还原作用下可减少甚至去除从而进一步净化晶界，提高热导率。氧化钪的加入能够通过细化晶粒并引入更多的穿晶断裂的方式以提高产品的抗弯强度。与真空热压烧结相比，本发明采用更为省时省力的无压烧结法制备出高性能氮化铝陶瓷，其性能接近部分热压烧结氮化铝陶瓷。
Method for preparing high-performance aluminum nitride ceramic substrate through double doping of rare earth fluoride and scandium oxide
The invention discloses a method for preparing a high-performance aluminum nitride ceramic substrate through double doping of rare earth fluoride and scandium oxide, and belongs to the technical field of aluminum nitride ceramic preparation. The aluminum nitride ceramic is prepared from the following components in parts by weight through a pressureless sintering method: 90-100 parts of aluminum nitride, 0.01-10 parts of rare earth fluoride and 0.01-10 parts of scandium oxide. According to the invention, the rare earth fluoride and scandium oxide are co-doped as the sintering aid, the addition of the rare earth fluoride can form a liquid phase at a lower temperature to promote the densification of the green body and remove oxygen impurities, and meanwhile, the second phase can be reduced or even removed under the reduction action, so that the grain boundary is further purified, and the heat conductivity is improved. And the scandium oxide is added, so that the bending strength of the product can be improved by refining grains and introducing more transgranular fractures. Compared with vacuum hot pressing sintering, the high-performance aluminum nitride ceramic is prepared by adopting a pressureless sintering method which is more time-saving and labor-saving, and the performance of the high-performance aluminum nitride ceramic is close to that of partial hot pressing sintering aluminum nitride ceramic.
本发明公开了一种稀土氟化物与氧化钪双掺制备高性能氮化铝陶瓷基板的方法，属于氮化铝陶瓷制备技术领域。其由以下重量份组分用无压烧结法制备得到：氮化铝90‑100份，稀土氟化物0.01‑10份，氧化钪0.01‑10份。本发明以稀土氟化物与氧化钪双掺作为烧结助剂，稀土氟化物的加入能够在较低温度形成液相，促进坯体致密化并去除氧杂质，同时其第二相在还原作用下可减少甚至去除从而进一步净化晶界，提高热导率。氧化钪的加入能够通过细化晶粒并引入更多的穿晶断裂的方式以提高产品的抗弯强度。与真空热压烧结相比，本发明采用更为省时省力的无压烧结法制备出高性能氮化铝陶瓷，其性能接近部分热压烧结氮化铝陶瓷。
Method for preparing high-performance aluminum nitride ceramic substrate through double doping of rare earth fluoride and scandium oxide
一种稀土氟化物与氧化钪双掺制备高性能氮化铝陶瓷基板的方法
WU SHANGHUA (author) / CHEN PEI (author) / ZONG XIAO (author)
2022-09-06
Patent
Electronic Resource
Chinese
IPC:
C04B
Kalk
,
LIME
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