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Method for producing barium titanate film
Provided is a method for producing a barium titanate film in which a barium titanate film is formed from a starting material gas and a reaction gas. The present invention relates to a method for forming a barium titanate film by performing an ALD cycle including a titanium oxide film forming step in which TDMAT (Ti [N (CH3) 2] 4) is used as a first starting material gas and OH radicals are used as a reaction gas, and a barium oxide film forming step in which a barium titanate film is formed by performing an ALD cycle in which the first starting material gas is used as a second starting material gas and the OH radicals are used as a reaction gas. The titanium oxide film and the barium oxide film are alternately formed in a positive or reverse order using the gasified barium complex as a second raw material gas and OH radicals as a reaction gas.
本发明在于提供一种由原料气体和反应气体形成钛酸钡膜的钛酸钡膜的制造方法。本发明涉及一种通过实施ALD循环而成膜出钛酸钡膜的方法，ALD循环包括氧化钛膜形成工序和氧化钡膜形成工序，氧化钛膜形成工序中，使用TDMAТ(Тi[N(CH3)2]4)作为第1原料气体，使用OH自由基作为反应气体，氧化钡膜形成工序中，使用气化后的钡络合物作为第2原料气体，使用OH自由基作为反应气体，氧化钛膜和氧化钡膜以正顺序或逆顺序交替地形成。
Method for producing barium titanate film
Provided is a method for producing a barium titanate film in which a barium titanate film is formed from a starting material gas and a reaction gas. The present invention relates to a method for forming a barium titanate film by performing an ALD cycle including a titanium oxide film forming step in which TDMAT (Ti [N (CH3) 2] 4) is used as a first starting material gas and OH radicals are used as a reaction gas, and a barium oxide film forming step in which a barium titanate film is formed by performing an ALD cycle in which the first starting material gas is used as a second starting material gas and the OH radicals are used as a reaction gas. The titanium oxide film and the barium oxide film are alternately formed in a positive or reverse order using the gasified barium complex as a second raw material gas and OH radicals as a reaction gas.
本发明在于提供一种由原料气体和反应气体形成钛酸钡膜的钛酸钡膜的制造方法。本发明涉及一种通过实施ALD循环而成膜出钛酸钡膜的方法，ALD循环包括氧化钛膜形成工序和氧化钡膜形成工序，氧化钛膜形成工序中，使用TDMAТ(Тi[N(CH3)2]4)作为第1原料气体，使用OH自由基作为反应气体，氧化钡膜形成工序中，使用气化后的钡络合物作为第2原料气体，使用OH自由基作为反应气体，氧化钛膜和氧化钡膜以正顺序或逆顺序交替地形成。
Method for producing barium titanate film
钛酸钡膜的制造方法
SATO EIJI (author) / SAKAMOTO HITOSHI (author)
2022-09-13
Patent
Electronic Resource
Chinese
IPC:
C04B
Kalk
,
LIME
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