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Zirconium oxide solid solution yttrium oxide ceramic as well as preparation method and application thereof
The invention discloses zirconium oxide solid solution yttrium oxide ceramic as well as a preparation method and application thereof. Zirconium oxide-yttrium oxide comprises the following components by mole: 50-95 mol% of yttrium oxide and 5-50 mol% of zirconium oxide. The preparation method of the ceramic material comprises the following steps: weighing yttrium oxide powder and zirconium oxide powder as initial raw materials according to the molar percentage of ceramic, adding absolute ethyl alcohol, and carrying out ball milling and mixing to obtain slurry; drying the slurry, grinding in an agate mortar, screening to obtain yttrium oxide-zirconium oxide mixed powder, carrying out dry pressing on the mixed powder in a rigid mold, and carrying out cold isostatic pressing treatment to obtain a ceramic biscuit; and sintering the ceramic biscuit to obtain the yttrium oxide-zirconium oxide ceramic. The method is simple in process, short in production period and high in production efficiency, the mechanical property of the prepared zirconia solid solution yttrium oxide ceramic is obviously improved compared with that of yttrium oxide ceramic, the plasma erosion resistance is excellent, and the ceramic is suitable for being applied to preparation of semiconductor etching cavity components.
本发明公开了一种氧化锆固溶氧化钇陶瓷、其制备方法及其应用，氧化锆‑氧化钇摩尔组分如下：氧化钇：50～95mol％，氧化锆：5～50mol％。该陶瓷材料制备方法步骤如下：按照陶瓷的摩尔百分含量称量氧化钇粉体和氧化锆粉体作为起始原料，加入无水乙醇，进行球磨混合得到浆料；再将浆料干燥处理，然后在玛瑙研钵研磨，并过筛网得到氧化钇‑氧化锆混合粉体，将混合粉体在刚模中干压成型并随后冷等静压处理，得到陶瓷素坯；将陶瓷素坯进行烧结，得到氧化钇‑氧化锆陶瓷。本方法工艺简单、生产周期短、生产效率高，制备的氧化锆固溶氧化钇陶瓷相较于氧化钇陶瓷的力学性能有了明显提升，并且耐等离子体侵蚀性能优异，本发明陶瓷适合应用于制备半导体刻蚀腔室部件。
Zirconium oxide solid solution yttrium oxide ceramic as well as preparation method and application thereof
The invention discloses zirconium oxide solid solution yttrium oxide ceramic as well as a preparation method and application thereof. Zirconium oxide-yttrium oxide comprises the following components by mole: 50-95 mol% of yttrium oxide and 5-50 mol% of zirconium oxide. The preparation method of the ceramic material comprises the following steps: weighing yttrium oxide powder and zirconium oxide powder as initial raw materials according to the molar percentage of ceramic, adding absolute ethyl alcohol, and carrying out ball milling and mixing to obtain slurry; drying the slurry, grinding in an agate mortar, screening to obtain yttrium oxide-zirconium oxide mixed powder, carrying out dry pressing on the mixed powder in a rigid mold, and carrying out cold isostatic pressing treatment to obtain a ceramic biscuit; and sintering the ceramic biscuit to obtain the yttrium oxide-zirconium oxide ceramic. The method is simple in process, short in production period and high in production efficiency, the mechanical property of the prepared zirconia solid solution yttrium oxide ceramic is obviously improved compared with that of yttrium oxide ceramic, the plasma erosion resistance is excellent, and the ceramic is suitable for being applied to preparation of semiconductor etching cavity components.
本发明公开了一种氧化锆固溶氧化钇陶瓷、其制备方法及其应用，氧化锆‑氧化钇摩尔组分如下：氧化钇：50～95mol％，氧化锆：5～50mol％。该陶瓷材料制备方法步骤如下：按照陶瓷的摩尔百分含量称量氧化钇粉体和氧化锆粉体作为起始原料，加入无水乙醇，进行球磨混合得到浆料；再将浆料干燥处理，然后在玛瑙研钵研磨，并过筛网得到氧化钇‑氧化锆混合粉体，将混合粉体在刚模中干压成型并随后冷等静压处理，得到陶瓷素坯；将陶瓷素坯进行烧结，得到氧化钇‑氧化锆陶瓷。本方法工艺简单、生产周期短、生产效率高，制备的氧化锆固溶氧化钇陶瓷相较于氧化钇陶瓷的力学性能有了明显提升，并且耐等离子体侵蚀性能优异，本发明陶瓷适合应用于制备半导体刻蚀腔室部件。
Zirconium oxide solid solution yttrium oxide ceramic as well as preparation method and application thereof
一种氧化锆固溶氧化钇陶瓷、其制备方法及其应用
SHI YING (author) / LIU YUAN (author) / XIE JIANJUN (author) / ZHANG LEI (author)
2022-09-30
Patent
Electronic Resource
Chinese
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